The present invention is directed to a purified polyalkylsiloxane composition having a boiling point, under atmospheric conditions, of less than about 250.degree. C. and containing high boiling impurities, including siloxanes and silanol-terminated siloxanes, that have boiling points, under atmospheric conditions, of greater than about 250.degree. C. in a total concentration of less than 14 ppm. The present invention is further directed to a method of producing a purified polyalkylsiloxane composition, having a boiling point, under atmospheric conditions, of less than about 250.degree. C., by distilling a polyalkylsiloxane starting material containing high boiling impurities having boiling points, under atmospheric conditions, of greater than about 250.degree. C. in a total concentration of at least 14 ppm, under conditions effective to produce a purified polyalkylsiloxane composition having a boiling point under atmospheric conditions of less than about 250.degree. C., and containing high boiling impurities, having boiling points, under atmospheric conditions, of greater than about 250.degree. C., in a total concentration of less than 14 ppm. In preferred embodiments, low boiling components (including silanols and preferably also hexamethylcyclotrisiloxane) are reduced to less than about 100 ppm. The present invention is further directed to a method of producing fused silica glass by conversion of the purified polyalkylsiloxane composition.