发明授权
US5706212A Infrared ellipsometer/polarimeter system, method of calibration, and use
thereof
失效
红外椭偏仪/偏振计系统，校准方法及其应用
- 专利标题： Infrared ellipsometer/polarimeter system, method of calibration, and use thereof
- 专利标题（中）： 红外椭偏仪/偏振计系统，校准方法及其应用
-
申请号： US618820申请日： 1996-03-20
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公开(公告)号： US5706212A公开(公告)日： 1998-01-06
- 发明人: Daniel W. Thompson , Blaine D. Johs
- 申请人： Daniel W. Thompson , Blaine D. Johs
- 申请人地址： NE Lincoln NE Lincoln
- 专利权人： Board of Regents of University of Nebraska,J.A. Woollam Co. Inc.
- 当前专利权人： Board of Regents of University of Nebraska,J.A. Woollam Co. Inc.
- 当前专利权人地址： NE Lincoln NE Lincoln
- 主分类号： G01J3/28
- IPC分类号： G01J3/28 ; G01J4/00 ; G01N21/21 ; G01J3/447
摘要：
A sample system investigation system, such as an ellipsometer or polarimeter system, for use in investigating sample systems with electromagnetic wavelengths in the infrared range, and a calibration method for compensating nonidealities in multi-dimensional system rotated and non-rotated component representing matricies, are disclosed. An essentially achromatic compensator of dual-rhomb construction, which introduces a (3*LAMBDA/4) phase shift, but essentially no deviation in the direction of propagation of a polarized beam of electromagnetic wavelengths caused to pass therethrough, even when said compensator is caused to continuously rotate, is also disclosed.
公开/授权文献
- USD339046S Cordless screwdriver 公开/授权日：1993-09-07
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