发明授权
- 专利标题： Vertical heat treatment apparatus
- 专利标题（中）： 立式热处理设备
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申请号： US706530申请日： 1996-09-04
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公开(公告)号： US5709543A公开(公告)日： 1998-01-20
- 发明人: Tomohisa Shimazu
- 申请人： Tomohisa Shimazu
- 申请人地址： JPX Tokyo-To
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JPX Tokyo-To
- 优先权： JPX7-254676 19950906
- 主分类号： H01L21/22
- IPC分类号： H01L21/22 ; C23C16/458 ; C30B25/08 ; C30B25/10 ; C30B25/12 ; C30B31/10 ; C30B31/12 ; C30B31/14 ; H01L21/00 ; H01L21/205 ; H01L21/31 ; H01L21/324 ; F27D3/12
摘要：
The vertical heat treatment apparatus according to the present invention in which a substrate holder holding a plurality of substrates-to-be-processed at a vertical interval is mounted on the top of a cap for opening and closing the bottom opening (furnace throat) of a vertical heat treatment furnace through a heat insulation structure for a heat treatment in the uniform heat region in the furnace, the heat insulation structure comprising support rods for supporting the substrate holder, and a plurality of thin heat insulation plates having insertion holes in which the support rods are loosely inserted in, and supported by the support rods, separated from each other by spacers at a prescribed interval in the direction of height of the support rods, whereby the heat insulation structure can have a simple structure and have decreased heat capacities, and throughput can be improved.
公开/授权文献
- USD334474S Toothbrush handle 公开/授权日：1993-04-06
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