发明授权
- 专利标题: Temperature-insensitive vertical-cavity surface-emitting lasers and method for fabrication thereof
- 专利标题(中): 不敏感的垂直腔表面发射激光器及其制造方法
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申请号: US535597申请日: 1995-09-28
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公开(公告)号: US5712865A公开(公告)日: 1998-01-27
- 发明人: Weng W. Chow , Kent D. Choquette , Paul L. Gourley
- 申请人: Weng W. Chow , Kent D. Choquette , Paul L. Gourley
- 申请人地址: NM Albuquerque
- 专利权人: Sandia Corporation
- 当前专利权人: Sandia Corporation
- 当前专利权人地址: NM Albuquerque
- 主分类号: H01S5/068
- IPC分类号: H01S5/068 ; H01S5/183 ; H01S5/34 ; H01S5/343 ; H01S3/19
摘要:
A temperature-insensitive vertical-cavity surface-emitting laser (VCSEL) and method for fabrication thereof. The temperature-insensitive VCSEL comprises a quantum-well active region within a resonant cavity, the active region having a gain spectrum with a high-order subband (n.gtoreq.2) contribution thereto for broadening and flattening the gain spectrum, thereby substantially reducing any variation in operating characteristics of the VCSEL over a temperature range of interest. The method for forming the temperature-insensitive VCSEL comprises the steps of providing a substrate and forming a plurality of layers thereon for providing first and second distributed Bragg reflector (DBR) mirror stacks with an active region sandwiched therebetween, the active region including at least one quantum-well layer providing a gain spectrum having a high-order subband (n.gtoreq.2) gain contribution, and the DBR mirror stacks having predetermined layer compositions and thicknesses for providing a cavity resonance within a predetermined wavelength range substantially overlapping the gain spectrum.
公开/授权文献
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