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US5719004A Positive photoresist composition containing a 2,4-dinitro-1-naphthol 失效
含有2,4-二硝基-1-萘酚的正性光致抗蚀剂组合物

Positive photoresist composition containing a 2,4-dinitro-1-naphthol
Abstract:
A light-sensitive positive photoresist composition containing a film forming novolak resin, a quinone-diazide photoactive compound, a solvent, and a 2,4-dinitro-1-naphthol dye, where the dye is present at a level greater than 0.5 weight percent of the total photoresist composition. The dye reduces the linewidth variation of the resist pattern on a reflective substrate without significantly reducing the lithographic performance of the light-sensitive composition.
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