Invention Grant
US5719004A Positive photoresist composition containing a 2,4-dinitro-1-naphthol
失效
含有2,4-二硝基-1-萘酚的正性光致抗蚀剂组合物
- Patent Title: Positive photoresist composition containing a 2,4-dinitro-1-naphthol
- Patent Title (中): 含有2,4-二硝基-1-萘酚的正性光致抗蚀剂组合物
-
Application No.: US695157Application Date: 1996-08-07
-
Publication No.: US5719004APublication Date: 1998-02-17
- Inventor: Ping-Hung Lu , Ralph R. Dammel , Elaine G. Kokinda , Sunit S. Dixit
- Applicant: Ping-Hung Lu , Ralph R. Dammel , Elaine G. Kokinda , Sunit S. Dixit
- Applicant Address: VGX
- Assignee: Clariant Finance (BVI) Limited
- Current Assignee: Clariant Finance (BVI) Limited
- Current Assignee Address: VGX
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/022 ; G03F7/023 ; G03F7/09 ; G03F7/32 ; G03F7/38 ; G03F7/40 ; H01L21/027
Abstract:
A light-sensitive positive photoresist composition containing a film forming novolak resin, a quinone-diazide photoactive compound, a solvent, and a 2,4-dinitro-1-naphthol dye, where the dye is present at a level greater than 0.5 weight percent of the total photoresist composition. The dye reduces the linewidth variation of the resist pattern on a reflective substrate without significantly reducing the lithographic performance of the light-sensitive composition.
Public/Granted literature
- US5145983A Preparation of N-acylimidazoles Public/Granted day:1992-09-08
Information query
IPC分类: