发明授权
- 专利标题: Method and apparatus for polishing
- 专利标题(中): 抛光方法和设备
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申请号: US655672申请日: 1996-05-30
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公开(公告)号: US5722875A公开(公告)日: 1998-03-03
- 发明人: Mitsuaki Iwashita , Nobuo Konishi , Gerald A. Krulik , Gary Cohrt
- 申请人: Mitsuaki Iwashita , Nobuo Konishi , Gerald A. Krulik , Gary Cohrt
- 申请人地址: JPX Tokyo AZ Phoenix
- 专利权人: Tokyo Electron Limited,IPEC-Planar
- 当前专利权人: Tokyo Electron Limited,IPEC-Planar
- 当前专利权人地址: JPX Tokyo AZ Phoenix
- 优先权: JPX7-155402 19950530; JPX7-155403 19950530
- 主分类号: B24B37/015
- IPC分类号: B24B37/015 ; B24B49/02 ; B24B49/14 ; B24B49/00 ; B24B51/00
摘要:
The invention relates to a method and an apparatus for polishing an object by CMP with use of a polishing liquid. A change point of the temperature of a surface-to-be-polished of the object at the time of polishing is detected on the basis of information on the temperature of the surface-to-be-polished of the object, which information is obtained in advance at the time of polishing. An end point of the polishing of the object is detected on the basis of information on the change point. The object and a reference object are interlocked and simultaneously polished by a common polishing body, the degree-of-polishing of the reference object is monitored, and the degree-of-polishing of the object is detected on the basis of the degree-of-polishing of the reference object.