发明授权
- 专利标题: Active matrix substrate and switching element
- 专利标题(中): 有源矩阵基板和开关元件
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申请号: US581965申请日: 1996-01-02
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公开(公告)号: US5726461A公开(公告)日: 1998-03-10
- 发明人: Takayuki Shimada , Atsushi Ban , Kazuko Hirakawa
- 申请人: Takayuki Shimada , Atsushi Ban , Kazuko Hirakawa
- 申请人地址: JPX Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JPX Osaka
- 优先权: JPX7-014733 19950131
- 主分类号: G02F1/1343
- IPC分类号: G02F1/1343 ; G02F1/136 ; G02F1/1368 ; H01L21/336 ; H01L23/538 ; H01L29/45 ; H01L29/786 ; H01L29/04 ; H01L33/00
摘要:
An active matrix substrate comprises an insulation substrate, a plurality of pixel electrodes arranged in a matrix form on the insulation substrate, a switching element provided for each of the pixel electrodes, gate signal lines for supplying a signal to the switching elements, and source signal lines for supplying a data signal to the pixel electrodes via the corresponding switching elements. Each switching element is a thin film transistor (TFT) including a gate electrode, an insulating layer formed on the insulation substrate to cover the gate electrode, a semiconductor layer formed on the insulating layer opposite to the gate electrode, a source electrode formed on one end of the semiconductor layer, one of the source signal lines overlapping the source electrode, and a drain electrode formed on the other end of the semiconductor layer, one of the gate signal lines overlapping the drain electrode. The source and drain electrodes have a two-layer structure of an upper amorphous semiconductor layer and a lower micro-crystalline semiconductor layer. The source signal lines have a two-layer structure of an upper conductive layer and a lower protection layer.
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