Invention Grant
- Patent Title: Arc ion plating device and arc ion plating system
- Patent Title (中): 电弧离子镀装置及电弧离子镀系统
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Application No.: US325438Application Date: 1994-12-23
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Publication No.: US5730847APublication Date: 1998-03-24
- Inventor: Koji Hanaguri , Kunihiko Tsuji , Homare Nomura , Hiroshi Tamagaki , Hiroshi Kawaguchi , Katsuhiko Shimojima , Hirofumi Fujii , Toshiya Kido , Takeshi Suzuki , Yoichi Inoue
- Applicant: Koji Hanaguri , Kunihiko Tsuji , Homare Nomura , Hiroshi Tamagaki , Hiroshi Kawaguchi , Katsuhiko Shimojima , Hirofumi Fujii , Toshiya Kido , Takeshi Suzuki , Yoichi Inoue
- Applicant Address: JPX Kobe
- Assignee: Kabushiki Kaisha Kobeseikosho
- Current Assignee: Kabushiki Kaisha Kobeseikosho
- Current Assignee Address: JPX Kobe
- Priority: JPX5-081406 19930315
- Main IPC: C23C14/32
- IPC: C23C14/32 ; H01J37/32 ; H01L21/00 ; C23C14/24
Abstract:
The present invention relates to an arc ion plating device utilizing a vacuum arc discharge to be utilized for the surface process of works and to an arc ion plating system provided with the above-mentioned device, and the present invention offers the device and the system which are able to realize extremely high productivity by an efficient handling of works. The device according to the present invention comprises a rod-shaped evaporation source and works to be coated with a film being disposed so as to surround the rod-shaped evaporation source, The device is so constituted that the works can be moved relative to the rod-shaped evaporation source in the axial direction of the rod-shaped evaporation source.
Public/Granted literature
- US4430949A Shavings--or chips--fired burner unit for heating boilers Public/Granted day:1984-02-14
Information query
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