发明授权
- 专利标题: Double-walled mircrowave plasma based applicator
- 专利标题(中): 双壁mircrowave等离子体涂抹器
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申请号: US601477申请日: 1996-02-14
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公开(公告)号: US5747917A公开(公告)日: 1998-05-05
- 发明人: Harald Herchen
- 申请人: Harald Herchen
- 申请人地址: CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: CA Santa Clara
- 主分类号: H01L21/302
- IPC分类号: H01L21/302 ; H01J37/32 ; H01L21/205 ; H01L21/3065 ; H01J17/26 ; H01J7/24 ; H01J61/28 ; H05B31/26
摘要:
An improved plasma applicator uses a double-walled sapphire sleeve assembly to provide a high efficiency cooling mechanism that is adapted for use with high power applications and aggressive plasma chemistries in the generation of a plasma. Plasma contained within a highly thermally emissive first sapphire member heats the member, causing it to radiate thermal energy. The radiated thermal energy crosses a narrow gap and passes through an infrared-transparent second sapphire member. An infrared-absorbing coolant fluid that exhibits negligible microwave absorption is flowed in a second gap between the second sapphire member and a third member and absorbs most of the infrared radiation over the fluid's bulk. The use of a bulk fluid optimizes the cooling of the plasma to reduce ion and electron density and maximize reactive species output from the applicator to a vacuum process chamber.
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