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US5751750A Laser system and method with thermally compensated optics 失效
具有热补偿光学的激光系统和方法

Laser system and method with thermally compensated optics
Abstract:
A laser system with compensated optics contains at least one optical element which is thermally coupled to a heat source in order to thermally compensate for a deformation of optical elements disposed in a beam path of the laser system. The deformation is brought about by the laser beam.
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