公开(公告)号：US5134641A

公开(公告)日：1992-07-28

申请号：US594733

申请日：1990-10-09

Applicant: Dirk Friede ,  Volker Bruckner ,  Rudolf Baumgartl ,  Hans-Jurgen Cirkel

Inventor： Dirk Friede ,  Volker Bruckner ,  Rudolf Baumgartl ,  Hans-Jurgen Cirkel

IPC: H01J35/22 ,  H01J3/02 ,  H01J17/40 ,  H01J33/00 ,  H01J37/075 ,  H01J37/077 ,  H01S3/09 ,  H01S3/0971 ,  H05G2/00

CPC classification number: H05G2/003 ,  H01J17/40 ,  H01J3/025 ,  H01J33/00 ,  H01S3/09716

Abstract: A plasma X-ray tube, which can be referred to as a one-chamber ionizing tube for pre-ionizing TE lasers, in particular excimer lasers, includes an extended, box-like housing with a U-shaped hollow cathode which is disposed in the interior of the housing and is also elongated. The open side of the hollow electrode faces an X-ray target which is in the form of a gas-tight foil. Between the X-ray target and the hollow cathode is a long wire-shaped igniting electrode. When a positive voltage or a voltage pulse is applied to the igniting electrode, an electrical field is formed around it. Electrons that are present are forced onto a long, spiral path and gas atoms are ionized under the influence of the electrical field and because of ambient radiation. Electron avalanches form and lead to initiation of a wire discharge. When the accelerator voltage, which is typically at most between 60 kV and 120 kV, is applied to the hollow cathode low-pressure plasma, ions are extracted and accelerated against the hollow cathode. When the ions impact, secondary electrons are emitted from the hollow cathode and are accelerated in the opposite direction, so that an electron beam forms and strikes the X-ray target to generate X-ray retarding radiation. The plasma X-ray tube is fundamentally suitable as an electron gun, with a suitable electron-beam permeable configuration of a foil that covers the window opening in the target retaining wall and serves as an electron window.

Abstract translation: 等离子体X射线管，其可以被称为用于预电离TE激光器的单室电离管，特别是准分子激光器，包括具有U形中空阴极的延伸的盒状壳体，其设置在 外壳的内部也是细长的。 中空电极的开放面面对呈气密箔形式的X射线靶。 在X射线靶和空心阴极之间是长线形点火电极。 当向点火电极施加正电压或电压脉冲时，在其周围形成电场。 存在的电子被强制到长的螺旋路径上，并且气体原子在电场的影响下以及由于环境辐射而被电离。 形成电子雪崩并导致引线放电。 当通常在60kV和120kV之间的加速器电压被施加到空心阴极低压等离子体时，离子被提取并抵抗空心阴极加速。 当离子撞击时，二次电子从空心阴极发射并沿相反方向加速，使得电子束形成并撞击X射线靶以产生X射线延迟辐射。 等离子体X射线管基本上适合作为电子枪，具有覆盖目标挡土墙中的窗口开口并用作电子窗口的箔的合适的电子束可透过构型。

公开(公告)号：US4955045A

公开(公告)日：1990-09-04

申请号：US335700

申请日：1989-04-10

Applicant: Dirk Friede ,  Hans-Juergen Cirkel ,  Rudolf Baumgartl ,  Matthias Schmutzler

Inventor： Dirk Friede ,  Hans-Juergen Cirkel ,  Rudolf Baumgartl ,  Matthias Schmutzler

IPC: H01J35/22 ,  H01J3/02 ,  H01J17/40 ,  H01J33/00 ,  H01J37/075 ,  H01J37/077 ,  H01S3/09 ,  H01S3/0971 ,  H05G2/00

CPC classification number: H01S3/09716 ,  H01J17/40 ,  H01J3/025 ,  H01J33/00 ,  H01J35/06 ,  H01J35/08 ,  H01J2235/186

Abstract: A plasma X-ray tube with high electron current densities includes a plasma chamber formed of a metal hollow cathode having an outer limiting wall with an X-ray target and a mutually spaced apart and opposed inner limiting wall with at least one metal acceleration grid being highly transparent to electron and ion radiation and being in alignment with the X-ray target defining a path. At least one ignition electrode in the form of a thin wire protrudes into the plasma chamber at positive potential relative to the hollow cathode. At least one anode retained in an insulated and gas-tight manner in one of the side walls of the hollow cathode is disposed laterally of the alignment of the target and grid and at positive potential relative to the hollow cathode. An acceleration chamber adjoins and communicates with the plasma chamber through the acceleration grid. The acceleration chamber is surrounded by metal walls in electrical and gas-tight connection with the limiting walls of the hollow cathode. An acceleration cathode is at high negative potential relative to the acceleration grid. The acceleration cathode has a shaft and a head in alignment with the path and spaced apart from the acceleration grid. The shaft of the acceleration cathode is retained in an insulating gas-tight duct in a wall facing the acceleration grid.

Abstract translation: 具有高电子密度的等离子体X射线管包括由金属空心阴极形成的等离子体室，该等离子体室具有带有X射线靶的外部限制壁和相互间隔开的相对的内部限制壁，至少一个金属加速栅是 对电子和离子辐射具有高度透明度并且与限定路径的X射线靶对准。 至少一个呈细线形式的点火电极相对于中空阴极以正电位突出到等离子体室中。 在中空阴极的一个侧壁中以绝缘和气密方式保持的至少一个阳极设置在靶和栅格的对准侧面并且相对于空心阴极处于正电位。 加速室通过加速栅格与等离子体室相连接。 加速室由与空心阴极的限制壁电气和气密连接的金属壁包围。 加速阴极相对于加速栅格处于高负电位。 加速阴极具有与路径对准并且与加速栅格间隔开的轴和头部。 加速阴极的轴保持在面向加速度格栅的壁中的绝缘气密管道中。

公开(公告)号：US5751750A

公开(公告)日：1998-05-12

申请号：US798513

申请日：1997-02-10

Applicant: Dirk Friede ,  Hermann Hage ,  Karl-Heinz Herzner ,  Volker Scholz

Inventor： Dirk Friede ,  Hermann Hage ,  Karl-Heinz Herzner ,  Volker Scholz

IPC: H01S3/042 ,  H01S3/04 ,  H01S3/05 ,  H01S3/08 ,  H01S3/139 ,  G02B5/08

CPC classification number: H01S3/08081 ,  H01S3/08059 ,  H01S3/0401 ,  H01S3/139

Abstract: A laser system with compensated optics contains at least one optical element which is thermally coupled to a heat source in order to thermally compensate for a deformation of optical elements disposed in a beam path of the laser system. The deformation is brought about by the laser beam.

Abstract translation: 具有补偿光学的激光系统包括至少一个光学元件，其与热源热耦合以便热补偿设置在激光系统的光束路径中的光学元件的变形。 变形是由激光束引起的。

公开(公告)号：US5138627A

公开(公告)日：1992-08-11

申请号：US601277

申请日：1990-10-22

Applicant: Dirk Friede ,  Willi Bette

Inventor： Dirk Friede ,  Willi Bette

IPC: H01S3/097 ,  H01S3/0971 ,  H01S3/0977

CPC classification number: H01S3/09713

Abstract: A preinoization device, in particular for X-ray preionization in discharge-pumped gas lasers, especially excimer lasers, is connected to a pulse generating network of an excitation circuit for gas lasers. A high voltage pulse transformer has a primary winding connected between a storage capacitor and a high-voltage switch in the pulse generating network. The pulse transformer emits preionizing pulses on the secondary side that lead to the firing of the laser glow discharge for a preionizing device, in particular an X-ray tube. The pulse transformer is constructed for this purpose as a saturable magnetic inductor with at least one secondary winding. If the high voltage switch is closed, when the pulse transformer is unsaturated its primary winding has its maximum inductance, so that there will be a secondary side voltage pulse at this time because of the law of induction. After a pre-set delay or retardation time of 50-100 ns, for example, the core will be saturated, the inductance of the primary winding will drop rapidly, and the full current will flow within the inversion circuit, so that the full high voltage builds up on the laser electrodes in order to fire the glow discharge.

Abstract translation: 特别是用于放电泵浦气体激光器，特别是准分子激光器中的X射线预电离的预化装置连接到用于气体激光器的激励电路的脉冲发生网络。 高压脉冲变压器具有连接在脉冲发生网络中的存储电容器和高压开关之间的初级绕组。 脉冲变压器在次级侧发射预激电脉冲，导致激发辉光放电的激发用于预电离装置，特别是X射线管。 脉冲变压器为此目的构建为具有至少一个次级绕组的饱和磁感应电感器。 如果高压开关闭合，当脉冲变压器不饱和时，其初级绕组具有最大的电感，因此由于归一定律，此时将存在次级侧电压脉冲。 在预设的延迟或延迟时间为50-100ns之后，例如，芯将饱和，初级绕组的电感将迅速下降，并且全电流将在反相电路内流动，从而使全高 在激光电极上积聚电压，以发光辉光放电。

公开(公告)号：US5138622A

公开(公告)日：1992-08-11

申请号：US632933

申请日：1990-12-20

Applicant: Dirk Friede ,  Willi Bette

Inventor： Dirk Friede ,  Willi Bette

IPC: H01S3/097 ,  H01S3/0971 ,  H03K3/53 ,  H03K3/55

CPC classification number: H01S3/0971 ,  H03K3/55

Abstract: An apparatus and method for generating high-power, high-voltage pulses for a laser having laser electrodes with an electrode path includes at least one charge unit. A pulse-generating network has an input side connected to the at least one charge unit and an output side connected to the laser electrodes. The pulse-generating network has a first branch and a second branch connected parallel to one another and connected to the laser electrodes. The first branch has a first charge capacitor with a relatively high capacitance and a magnetic switch in the form of a saturatable inductor connected in series with the first charge capacitor. The second branch has a second charge capacitor with a relatively low capacitance. A trigger branch is connected parallel to the electrode path. The trigger branch has at least one high-voltage switch and an in-series inductance. The high voltage switch serves as a trigger for initiating a saturation of the magnetic switch and a discharge of the first charge capacitor through the saturated magnetic switch into the laser electrode path.

Abstract translation: 一种用于产生具有具有电极路径的激光电极的激光器的高功率，高电压脉冲的装置和方法包括至少一个充电单元。 脉冲发生网络具有连接到至少一个充电单元的输入端和连接到激光电极的输出侧。 脉冲发生网络具有彼此并联连接并连接到激光电极的第一分支和第二分支。 第一分支具有相对高电容的第一充电电容器和与第一充电电容器串联连接的饱和电感器形式的磁开关。 第二分支具有相对较低电容的第二充电电容器。 触发分支与电极路径平行连接。 触发分支具有至少一个高压开关和串联电感。 高电压开关用作触发器，用于启动磁性开关的饱和，并将第一充电电容器通过饱和磁性开关放电到激光电极路径中。

公开(公告)号：US5050178A

公开(公告)日：1991-09-17

申请号：US604829

申请日：1990-10-26

Applicant: Volker Bruckner ,  Willi Bette ,  Dirk Friede ,  Hans-Jurgen Cirkel

Inventor： Volker Bruckner ,  Willi Bette ,  Dirk Friede ,  Hans-Jurgen Cirkel

IPC: H01S3/097 ,  H01S3/0971

CPC classification number: H01S3/0971

Abstract: An excitation circuit for TE lasers serves to generate a homogeneous high pressure glow discharge between laser electrodes within a gas space of a laser chamber. A fast acting high voltage switch of a pulse forming network is a multi-channel pseudo-spark switch and is preferably integrated with the laser. The switch is formed of a parallel circuit including a number of individual pseudo-spark switches with gaps. The total multi-channel pseudo-spark switch is filled with an ionizable low pressure gas filling at a given pressure. Voltage is applied to the anode and the cathode in such a way that the resulting gas discharge is located on the left-hand branch of the Paschen curve. The switch of the excitation circuit can also be used as a separate structural element for triggering an electrical high voltage switch circuit, and also for so-called flat plane laser systems.

Abstract translation: 用于TE激光器的激励电路用于在激光室的气体空间内的激光电极之间产生均匀的高压辉光放电。 脉冲形成网络的快速作用高压开关是多通道伪火花开关，并且优选地与激光器集成。 该开关由包括多个具有间隙的各个伪火花开关的并联电路构成。 整个多通道伪火花开关在给定压力下充满可离子化的低压气体。 以阳极和阴极的方式施加电压，使得所得到的气体放电位于帕邢曲线的左手分支上。 励磁电路的开关也可以用作用于触发电气高压开关电路的单独结构元件，也可用作所谓的平面激光系统。