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US5756901A Sensor and method for manufacturing a sensor 失效
用于制造传感器的传感器和方法

Sensor and method for manufacturing a sensor
摘要:
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
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