发明授权
- 专利标题: Sensor and method for manufacturing a sensor
- 专利标题(中): 用于制造传感器的传感器和方法
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申请号: US718603申请日: 1996-09-24
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公开(公告)号: US5756901A公开(公告)日: 1998-05-26
- 发明人: Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
- 申请人: Juergen Kurle , Karsten Funk , Franz Laermer , Michael Offenberg , Andrea Schilp
- 申请人地址: DEX Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DEX Stuttgart
- 优先权: DEX19537814.8 19951011
- 主分类号: G01L1/18
- IPC分类号: G01L1/18 ; B81B3/00 ; B81C1/00 ; G01P15/08 ; G01P15/125 ; H01L29/84 ; G01L1/00
摘要:
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
公开/授权文献
- US5343524A Intelligent security device 公开/授权日:1994-08-30