发明授权
US5762750A Magnetic neutral line discharged plasma type surface cleaning apparatus
失效
磁中性线排出等离子体型表面清洗装置
- 专利标题： Magnetic neutral line discharged plasma type surface cleaning apparatus
- 专利标题（中）： 磁中性线排出等离子体型表面清洗装置
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申请号： US851614申请日： 1997-05-06
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公开(公告)号： US5762750A公开(公告)日： 1998-06-09
- 发明人: Wei Chen , Takeshi Sunada , Masahiro Itoh , Hideki Fujimoto , Taijiro Uchida
- 申请人： Wei Chen , Takeshi Sunada , Masahiro Itoh , Hideki Fujimoto , Taijiro Uchida
- 申请人地址： JPX
- 专利权人： Nihon Shinku Gijutsu Kabushiki Kaisha
- 当前专利权人： Nihon Shinku Gijutsu Kabushiki Kaisha
- 当前专利权人地址： JPX
- 优先权： JPX8-120447 19960515
- 主分类号： H05H1/46
- IPC分类号： H05H1/46 ; C23C14/00 ; C23C16/44 ; C23C16/50 ; C23F4/00 ; C23G5/00 ; H01J37/32 ; H01L21/304 ; H05H1/00
摘要：
A surface cleaning apparatus using magnetic neutral line discharged plasma for the purpose of inner-wall surface cleaning of a vacuum vessel assembled in a semiconductor manufacturing machine, which comprises electromagnetic coils for producing a closed magnetic neutral line that is formed by circularly connecting points of zero-intensity magnetic field, rf electric field generator for continuously generating plasma by applying a rf electric field along the magnetic neutral line and a controller for controlling the size and position of the closed magnetic neutral line and the kind, temperature and density of the plasma being generated.
公开/授权文献
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