发明授权
US5780885A Accelerometers using silicon on insulator technology 失效
使用硅绝缘体技术的加速度计

Accelerometers using silicon on insulator technology
摘要:
Process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring device; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.
公开/授权文献
信息查询
0/0