发明授权
- 专利标题: Accelerometers using silicon on insulator technology
- 专利标题(中): 使用硅绝缘体技术的加速度计
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申请号: US698066申请日: 1996-08-15
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公开(公告)号: US5780885A公开(公告)日: 1998-07-14
- 发明人: Bernard Diem , Marie-Therese Delaye
- 申请人: Bernard Diem , Marie-Therese Delaye
- 申请人地址: FRX Paris
- 专利权人: Commissariat a l'Energie Atomique
- 当前专利权人: Commissariat a l'Energie Atomique
- 当前专利权人地址: FRX Paris
- 优先权: FRX9215771 19921228
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; B81B3/00 ; G01P15/08 ; G01P15/13 ; H01L21/306 ; H01L29/84 ; H01L29/82
摘要:
Process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring device; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.
公开/授权文献
- USD331262S Tape dispenser 公开/授权日:1992-11-24
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