发明授权
US5789777A Non-volatile memory having multi-bit data cells with double layered
floating gate structure
失效
具有双层浮栅结构的多位数据单元的非易失性存储器
- 专利标题: Non-volatile memory having multi-bit data cells with double layered floating gate structure
- 专利标题(中): 具有双层浮栅结构的多位数据单元的非易失性存储器
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申请号: US778410申请日: 1997-01-02
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公开(公告)号: US5789777A公开(公告)日: 1998-08-04
- 发明人: Toshiaki Kojima
- 申请人: Toshiaki Kojima
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 优先权: JPX8-030779 19960219
- 主分类号: G11C17/00
- IPC分类号: G11C17/00 ; G11C11/56 ; G11C16/04 ; H01L21/8247 ; H01L27/115 ; H01L29/788 ; H01L29/792 ; H01L29/76
摘要:
The non-volatile memory has a storage cell complying with multi-bit data by means of a double layered floating gate architecture. The cell comprises: source 2 and drain 3 which are distant from each other along a direction L in a semiconductor substrate 1; a single first floating gate 4A which is provided between the source and the drain and above a principal plane of the semiconductor substrate and extends along a direction crossing the direction L; a control gate 5 which is placed between the drain ad source and above a principal plane of the first floating gate; high impurity concentration layers 21, 22 which are isolated from the source and drain in the semiconductor substrate; a plurality of second floating gates 4B.sub.1, 4B.sub.2 which respectively extend across the first floating gate and above a principal plane of the first floating gate and extend from a position different than either of the source and the drain up to a position above a principal plane of the high impurity concentration layer; and a plurality of program gates 6.sub.1, 6.sub.2 which are placed correspondingly above principal planes of the second floating gates.
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