- Patent Title: Vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer, vinyl 4-tetrahydropyranyloxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer and preparation methods thereof
-
Application No.: US814823Application Date: 1997-03-11
-
Publication No.: US5792823APublication Date: 1998-08-11
- Inventor: Jin Baek Kim , Hyun Woo Kim , Jin Seuk Kim
- Applicant: Jin Baek Kim , Hyun Woo Kim , Jin Seuk Kim
- Applicant Address: KRX KRX
- Assignee: Hyundai Electronics Industries Co., Ltd.,Korea Advanced Institute of Science and Technology
- Current Assignee: Hyundai Electronics Industries Co., Ltd.,Korea Advanced Institute of Science and Technology
- Current Assignee Address: KRX KRX
- Priority: KRX96-68911 19961220
- Main IPC: C08F261/02
- IPC: C08F261/02 ; C08F8/00 ; C08F8/02 ; C08F8/28 ; C08F16/38 ; C08F216/14 ; C08F216/38 ; G03F7/004 ; G03F7/039 ; H01L21/027 ; C08F224/00 ; C08F216/12 ; C08F218/08
Abstract:
A vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer, a vinyl 4-tetrahydropyranyloxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer and a preparation method thereof are provided. The copolymers have excellent transparency because they are very low in optical absorbance in the deep uv range. In addition, the acetal structure in the backbone and in the substituted groups endows the photoresist of the copolymer with superior dry etch resistance.
Public/Granted literature
- US5243656A Audio circuit Public/Granted day:1993-09-07
Information query