发明授权
- 专利标题： Containment apparatus
- 专利标题（中）： 遏制装置
-
申请号： US705115申请日： 1996-08-29
-
公开(公告)号： US5794299A公开(公告)日： 1998-08-18
- 发明人: Thomas R. Gockel , Lorin Olson , Lynn Ryle , Brett A. Whitelaw
- 申请人： Thomas R. Gockel , Lorin Olson , Lynn Ryle , Brett A. Whitelaw
- 申请人地址： CA San Jose
- 专利权人： Ontrak Systems, Inc.
- 当前专利权人： Ontrak Systems, Inc.
- 当前专利权人地址： CA San Jose
- 主分类号： B08B3/02
- IPC分类号： B08B3/02 ; B08B11/00 ; B08B13/00
摘要：
A semiconductor processing system, such as a system for scrubbing both sides of a wafer at the same time, that includes a brush box containment apparatus for use with highly-acidic or other volatile chemical solutions, a roller positioning apparatus and a (brush) placement device.
公开/授权文献
- US5400772A Surgical retractor apparatus with improved clamping device 公开/授权日：1995-03-28