发明授权
US5798823A Illumination optical apparatus and projection exposure apparatus using it 失效
照明光学装置和使用它的投影曝光装置

  • 专利标题: Illumination optical apparatus and projection exposure apparatus using it
  • 专利标题(中): 照明光学装置和使用它的投影曝光装置
  • 申请号: US559398
    申请日: 1995-11-15
  • 公开(公告)号: US5798823A
    公开(公告)日: 1998-08-25
  • 发明人: Yuji Kudo
  • 申请人: Yuji Kudo
  • 申请人地址: JPX
  • 专利权人: Nikon Corporation
  • 当前专利权人: Nikon Corporation
  • 当前专利权人地址: JPX
  • 优先权: JPX6-286217 19941121
  • 主分类号: G02B27/09
  • IPC分类号: G02B27/09 G03F7/20 H01L21/027 G03B27/42 G03B27/54
Illumination optical apparatus and projection exposure apparatus using it
摘要:
The illumination optical apparatus of this invention is so arranged that light from a discharge lamp is collected by a rotationally symmetric collector mirror, the thus collected light is collimated into nearly parallel light by a collimator optical system, an optical integrator splits the parallel light into a plurality of light beams to form a plurality of secondary light sources, and thereafter the light from the secondary light sources is projected through a condenser optical system. A secondary light source distribution shaping portion is provided for shaping a light intensity distribution of the plural secondary light sources into a predetermined light intensity distribution, the two electrodes of the anode and cathode in the same discharge lamp are located in a predetermined relation, and an entrance surface of the optical integrator is located at a predetermined position with respect to a position where an image of a reflecting surface of the rotationally symmetric collector mirror is formed by the same collimator optical system.
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