发明授权
- 专利标题: Polishing pad and a method for making a polishing pad with covalently bonded particles
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申请号: US798001申请日: 1997-02-12
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公开(公告)号: US5823855A公开(公告)日: 1998-10-20
- 发明人: Karl M. Robinson
- 申请人: Karl M. Robinson
- 申请人地址: ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: ID Boise
- 主分类号: B24B37/24
- IPC分类号: B24B37/24 ; B24D3/28 ; B24D3/34 ; B24D13/14 ; H01L21/304 ; B24B7/04
摘要:
The present invention is a polishing pad for use in chemical-mechanical planarization of semiconductor wafers, and a method for making the polishing pad. The polishing pad has a body, molecular bonding links, and abrasive particles dispersed substantially uniformly throughout the body. The body is made from a polymeric matrix material and the molecular bonding links are covalently bonded to the matrix material. Substantially all of the abrasive particles are covalently bonded to at least one molecular bonding link. The molecular bonding links securely affix the abrasive particles to the matrix material to enhance the uniformity of the distribution of the abrasive particles throughout the pad and to substantially prevent the abrasive particles from breaking away from the pad.
公开/授权文献
- US4715203A Cold-working tool 公开/授权日:1987-12-29
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