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US5831308A MOSFET having a particular SOI structure 失效
MOSFET具有特定的SOI结构

MOSFET having a particular SOI structure
Abstract:
An MOSFET includes a substrate, an active region on the substrate, a first insulating element and a second insulating element located a distance apart from each other on the active region, the first and second insulating elements dividing the active region into a source region, a drain region, and a channel region, the channel region being disposed between the source region and the drain region, a third insulating film over the active region between the first and second insulating films, and a gate electrode over the third insulating film.
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