发明授权
- 专利标题： Spacers for field emission display and their fabrication method
- 专利标题（中）： 场发射显示屏及其制作方法
-
申请号： US603299申请日： 1996-02-20
-
公开(公告)号： US5842897A公开(公告)日： 1998-12-01
- 发明人: Hyo Soo Jeong , Young Rae Cho , Jae Yeol Oh
- 申请人： Hyo Soo Jeong , Young Rae Cho , Jae Yeol Oh
- 申请人地址： KRX Seoul
- 专利权人： Institute for Advanced Engineering
- 当前专利权人： Institute for Advanced Engineering
- 当前专利权人地址： KRX Seoul
- 优先权： KRX95-4079 19950228; KRX95-4305 19950303
- 主分类号： H01J9/18
- IPC分类号： H01J9/18 ; H01J9/24 ; H01J29/86 ; H01J31/12
摘要：
The invention is to provide the method for fabricating the spacers which are mechanically strong and have lower outgassing rate. Spacers in this invention are made of photosensitive glass. A net shaped photosensitive glass is etched by a first photolithography process and then the side wall of it is etched again by a second photolithography process for improving the efficiency of evacuation of the internal cavity of an FED.
公开/授权文献
- US4644516A Optical head 公开/授权日：1987-02-17
信息查询
