Invention Grant
US5844321A Semiconductor device comprising a chip which is provided with a via opening and is soldered on a support, and method of realizing this device 失效
半导体器件包括设置有通孔开口并被焊接在支撑体上的芯片以及实现该器件的方法

Semiconductor device comprising a chip which is provided with a via
opening and is soldered on a support, and method of realizing this
device
Abstract:
A semiconductor device comprises a chip soldered to a support. The chip comprises a semiconductor substrate, a via a ground plane on a rear surface, and an anti-adhesion layer deposited continuously inside the via. A solder layer which does not wet the anti-adhesion layer but which does wet the ground plane has a globular shape in the via opening and makes no mechanical contact with the walls of the via. The manufacturing process comprises the sandwiching of a soldering preform between the support and the rear surface provided with the ground plane and said anti-adhesion layer, and melting of the preform under pressure so that the solder rises in globular shape inside the via. The anti-adhesion layer is realized without mask.
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