- 专利标题: Projection exposure method and apparatus
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申请号: US724167申请日: 1996-09-30
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公开(公告)号: US5852490A公开(公告)日: 1998-12-22
- 发明人: Tomoyuki Matsuyama
- 申请人: Tomoyuki Matsuyama
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 主分类号: G02B13/14
- IPC分类号: G02B13/14 ; G03F7/20 ; H01L21/027 ; G03B27/54 ; G03B27/42
摘要:
A projection exposure system, which is used to transfer a pattern from a reticle or mask onto a substrate, incorporates a projection optical system that is capable of maintaining the same performance as that which can be found in an ideal environment, even when the actual use environment (e.g. atmospheric pressure and temperature) is not ideal. In addition, the projection optical system is able to recover the same performance as in an ideal environment through relatively minor adjustment of its projection optical system even when atmospheric pressure significantly changes due to, e.g., a change in location and altitude where the system is used.
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