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公开(公告)号：US10255491B2
公开(公告)日：2019-04-09
申请号：US13885909
申请日：2011-10-25
申请人： Masakazu Sekiguchi , Tetsuya Yamamoto , Masahiro Nei , Masamitsu Yanagihara , Satoshi Hagiwara , Isao Totsuka , Tomoyuki Matsuyama
发明人： Masakazu Sekiguchi , Tetsuya Yamamoto , Masahiro Nei , Masamitsu Yanagihara , Satoshi Hagiwara , Isao Totsuka , Tomoyuki Matsuyama
摘要： To appropriately guide a subject person while protecting a privacy of the subject person despite use of an captured image of the subject person, a guidance system includes: an image capturing unit capable of capturing an image containing a subject person from a first direction; a detection unit that detects a size of an image of the subject person from the image captured by the image capturing unit; and a guidance unit that provides guidance for the subject person based on a detection result of the detection unit.
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公开(公告)号：US07405803B2
公开(公告)日：2008-07-29
申请号：US11736177
申请日：2007-04-17
CPC分类号： G03B21/18 , G03B27/42 , G03F7/70258 , G03F7/705 , G03F7/70508 , G03F7/70525 , G03F7/706
摘要： A second communications server obtains adjustment information of an adjustment unit in an exposure apparatus and information related to image forming quality (such as wavefront aberration) of a projection optical system under an exposure condition that serves as a reference, via a first communications server, and then calculates an optimal adjustment amount of the adjustment unit under a target exposure condition based on the information. In addition, the second communications server obtains adjustment information of the adjustment and actual measurement data of image forming quality of the projection optical system via the first communications server, and then calculates the optimal adjustment amount of the adjustment unit under the target exposure condition based on the information. And, the second communications server controls the adjustment unit in the exposure apparatus via the first communications server, based on the calculations results.
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公开(公告)号：US20080094602A1
公开(公告)日：2008-04-24
申请号：US11979516
申请日：2007-11-05
申请人： Osamu Tanitsu , Hirohisa Tanaka , Kenichi Muramatsu , Norio Komine , Hisashi Nishinaga , Tomoyuki Matsuyama , Takehito Kudo
发明人： Osamu Tanitsu , Hirohisa Tanaka , Kenichi Muramatsu , Norio Komine , Hisashi Nishinaga , Tomoyuki Matsuyama , Takehito Kudo
CPC分类号： G03F7/70566 , G03B27/42 , G03F7/70091
摘要： An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.
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公开(公告)号：US20080074632A1
公开(公告)日：2008-03-27
申请号：US11979517
申请日：2007-11-05
申请人： Osamu Tanitsu , Hirohisa Tanaka , Kenichi Muramatsu , Norio Komine , Hisashi Nishinaga , Tomoyuki Matsuyama , Takehito Kudo
发明人： Osamu Tanitsu , Hirohisa Tanaka , Kenichi Muramatsu , Norio Komine , Hisashi Nishinaga , Tomoyuki Matsuyama , Takehito Kudo
IPC分类号： G03B27/72
CPC分类号： G03F7/70566 , G03B27/42 , G03F7/70091
摘要： An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.
摘要翻译： 一种照明光学系统，当安装在曝光系统中时，通过根据掩模的图案特性改变照明光的偏振状态，同时抑制光的强度损失，实现合适的照明条件。 照明光学系统具有用于提供用于照射被照射的面的线偏振光的光源单元和用于将照明光的偏振状态从预定极化状态改变为非极化状态的偏振状态改变装置，反之亦然 。 偏光状态改变装置配置在光源单元与被照射面之间的光路中。 可以从照明光路去除偏振状态改变装置，并且具有去偏振器，用于选择性地使入射的线偏振光去极化。
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5.发明申请公开(公告)号：US20060170901A1
公开(公告)日：2006-08-03
申请号：US11347421
申请日：2006-02-06
IPC分类号： G03B27/72
CPC分类号： G03F7/70566 , F21V9/14 , F21V13/02 , F21V13/12 , G02B5/3025 , G02B27/0977 , G02B27/286 , G03F7/701 , G03F7/70191 , G03F7/70308
摘要： There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
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公开(公告)号：US09047751B2
公开(公告)日：2015-06-02
申请号：US13513704
申请日：2010-12-28
申请人： Tetsuya Yamamoto , Masahiro Nei , Isao Totsuka , Tomoyuki Matsuyama , Masamitsu Yanagihara , Satoshi Hagiwara , Masakazu Sekiguchi
发明人： Tetsuya Yamamoto , Masahiro Nei , Isao Totsuka , Tomoyuki Matsuyama , Masamitsu Yanagihara , Satoshi Hagiwara , Masakazu Sekiguchi
CPC分类号： G06K9/00369 , G06T7/30 , G08B21/0476 , H04N7/18 , H04N7/181
摘要： To determine the state of a subject person with a simple structure, an image determining device includes: an imaging unit that captures an image from a first direction, the image including the subject person; a first detector that detects size information from the image, the size information being about the subject person in the first direction; a second detector that detects position-related information, the position-related information being different from the information detected by the first detector; and a determining unit that determines the state of the subject person, based on a result of the detection performed by the first detector and a result of the detection performed by the second detector.
摘要翻译： 为了确定具有简单结构的被摄体人的状态，图像确定装置包括：成像单元，其从第一方向捕获图像，所述图像包括被摄体人物; 第一检测器，其检测来自图像的尺寸信息，所述尺寸信息是关于所述被摄体在所述第一方向上; 第二检测器，其检测位置相关信息，所述位置相关信息不同于由所述第一检测器检测的信息; 以及确定单元，其基于由第一检测器执行的检测结果和由第二检测器执行的检测结果来确定被检者的状态。
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公开(公告)号：US20130321625A1
公开(公告)日：2013-12-05
申请号：US13985751
申请日：2012-03-21
申请人： Masamitsu Yanagihara , Tetsuya Yamamoto , Masahiro Nei , Satoshi Hagiwara , Isao Totsuka , Masakazu Sekiguchi , Tomoyuki Matsuyama
发明人： Masamitsu Yanagihara , Tetsuya Yamamoto , Masahiro Nei , Satoshi Hagiwara , Isao Totsuka , Masakazu Sekiguchi , Tomoyuki Matsuyama
IPC分类号： H04R1/32
CPC分类号： H04R1/32 , G08B13/19608 , G08B21/043 , G08B21/0476 , H04R27/00 , H04R2430/01
摘要： Provided is an electronic device capable of controlling an appropriate voice device, the electronic device including: an acquisition device that acquires an image capturing result from at least one image capturing device capable of capturing an image containing a subject person; a control device configured to control a voice device located outside an image capturing region of the image capturing device in accordance with the image capturing result of the image capturing device.
摘要翻译： 提供一种能够控制适当的语音装置的电子装置，所述电子装置包括：获取装置，其从能够拍摄包含被摄体人物的图像的至少一个图像拍摄装置获取图像拍摄结果; 控制装置，被配置为根据图像捕获装置的图像捕获结果控制位于图像捕获装置的图像捕获区域外部的语音装置。
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公开(公告)号：US20100149511A1
公开(公告)日：2010-06-17
申请号：US12656822
申请日：2010-02-17
申请人： Osamu Tanitsu , Hirohisa Tanaka , Kenichi Muramatsu , Norio Komine , Hisashi Nishinaga , Tomoyuki Matsuyama , Takehito Kudo
发明人： Osamu Tanitsu , Hirohisa Tanaka , Kenichi Muramatsu , Norio Komine , Hisashi Nishinaga , Tomoyuki Matsuyama , Takehito Kudo
IPC分类号： G03B27/72
CPC分类号： G03F7/70566 , G03B27/42 , G03F7/70091
摘要： An illumination optical system illuminates an irradiated surface with light supplied from a light source. The illumination optical system includes a diffractive optical element disposed in an optical path of linearly polarized light supplied from the light source. The diffractive optical element forms a multipole illumination field including a plurality of illumination fields. The illumination optical system also includes an optical integrator that forms a multipole light source including a plurality of planar light sources with light that has passed through the multipole illumination field. The illumination optical system also includes a polarization optical member disposed in an illumination optical path and that sets a polarization direction of light that has passed through the multipole light source to a predetermined polarization direction.
摘要翻译： 照明光学系统用从光源提供的光照射被照射的表面。 照明光学系统包括设置在从光源提供的线偏振光的光路中的衍射光学元件。 衍射光学元件形成包括多个照明场的多极照明场。 照明光学系统还包括光学积分器，其形成包括已经穿过多极照明场的光的多个平面光源的多极光源。 照明光学系统还包括设置在照明光路中并将已经通过多极光源的光的偏振方向设定为预定偏振方向的偏振光学构件。
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9.发明申请公开(公告)号：US20090316132A1
公开(公告)日：2009-12-24
申请号：US12461801
申请日：2009-08-25
CPC分类号： G03F7/70566 , F21V9/14 , F21V13/02 , F21V13/12 , G02B5/3025 , G02B27/0977 , G02B27/286 , G03F7/701 , G03F7/70191 , G03F7/70308
摘要： There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
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10.发明授权Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium 有权图像形成状态调整系统，曝光方法和曝光装置以及程序和信息存储介质公开(公告)号：US07391497B2
公开(公告)日：2008-06-24
申请号：US11736134
申请日：2007-04-17
CPC分类号： G03B21/18 , G03B27/42 , G03F7/70258 , G03F7/705 , G03F7/70508 , G03F7/70525 , G03F7/706
摘要： A second communications server obtains adjustment information of an adjustment unit in an exposure apparatus and information related to image forming quality (such as wavefront aberration) of a projection optical system under an exposure condition that serves as a reference, via a first communications server, and then calculates an optimal adjustment amount of the adjustment unit under a target exposure condition based on the information. In addition, the second communications server obtains adjustment information of the adjustment and actual measurement data of image forming quality of the projection optical system via the first communications server, and then calculates the optimal adjustment amount of the adjustment unit under the target exposure condition based on the information. And, the second communications server controls the adjustment unit in the exposure apparatus via the first communications server, based on the calculations results.
摘要翻译： 第二通信服务器经由第一通信服务器获取曝光装置中的调整单元的调整信息和与投影光学系统的图像形成质量（例如波前像差）有关的曝光条件下的调整信息，以及 然后基于该信息计算目标曝光条件下的调整单元的最佳调整量。 此外，第二通信服务器经由第一通信服务器获取投影光学系统的图像形成质量的调整和实际测量数据的调整信息，然后基于目标曝光条件计算调整单元的最佳调整量 信息。 并且，第二通信服务器基于计算结果经由第一通信服务器控制曝光装置中的调整单元。
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