发明授权
US5858627A Image formation utilizing photosensitive compositions containing low
metal content p-cresol oligomers
失效
使用含有低金属含量对甲酚低聚物的光敏组合物的图像形成
- 专利标题: Image formation utilizing photosensitive compositions containing low metal content p-cresol oligomers
- 专利标题(中): 使用含有低金属含量对甲酚低聚物的光敏组合物的图像形成
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申请号: US920564申请日: 1997-08-29
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公开(公告)号: US5858627A公开(公告)日: 1999-01-12
- 发明人: M. Dalil Rahman , Dinesh N. Khanna , Daniel Aubin , Douglas McKenzie
- 申请人: M. Dalil Rahman , Dinesh N. Khanna , Daniel Aubin , Douglas McKenzie
- 申请人地址: GBX
- 专利权人: Clariant Finance (BVI) Limited
- 当前专利权人: Clariant Finance (BVI) Limited
- 当前专利权人地址: GBX
- 主分类号: G03F7/022
- IPC分类号: G03F7/022 ; G03F7/023 ; H01L21/027 ; G03F7/38
摘要:
Process for producing a photosensitizer comprising a diazo ester of a p-cresol oligomer where at least one of the hydroxy groups on the p-cresol ring has been esterified with diazo-sulfonyl chloride comprising from about 60 to 100 mole % 2,1,4 or 2,1,5-diazo sulfonyl chloride, or a mixture thereof; and a photoresist comprising an admixture of the photosensitizer, which is present in the photoresist composition in an amount sufficient to uniformly photosensitive the photoresist composition, a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition, and a suitable solvent.
公开/授权文献
- US5342573A Method of producing a tungsten heavy alloy product 公开/授权日:1994-08-30
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