- 专利标题： Isolation of novolak resin without high temperature distillation and photoresist composition therefrom
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申请号： US939253申请日： 1997-09-29
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公开(公告)号： US5863700A公开(公告)日： 1999-01-26
- 发明人: M. Dalil Rahman , Ping-Hung Lu
- 申请人： M. Dalil Rahman , Ping-Hung Lu
- 申请人地址： VGX
- 专利权人： Clariant Finance (BVI) Limited
- 当前专利权人： Clariant Finance (BVI) Limited
- 当前专利权人地址： VGX
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; C08G8/00 ; C08G8/08 ; C08G8/10 ; C08G8/20 ; C08L61/08 ; G03F7/023 ; G03F7/039 ; G03C5/00
摘要：
The present invention provides a method for producing a water insoluble, aqueous alkali soluble novolak resins having consistent molecular weight and superior performance in photoresist composition, by isolating such novolak resin without high temperature distillation. A method is also provided for producing photoresist composition from such a novolak resin and for producing semiconductor devices using such a photoresist composition.
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