发明授权
US5871390A Method and apparatus for aligning and tensioning a pad/belt used in
linear planarization for chemical mechanical polishing
失效
用于对准和张紧用于化学机械抛光的线性平面化中的垫/带的方法和装置
- 专利标题： Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing
- 专利标题（中）： 用于对准和张紧用于化学机械抛光的线性平面化中的垫/带的方法和装置
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申请号： US795880申请日： 1997-02-06
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公开(公告)号： US5871390A公开(公告)日： 1999-02-16
- 发明人: Anil K. Pant , Douglas W. Young , Joseph R. Breivogel , Konstantin Volodarski , Leon Volfovski
- 申请人： Anil K. Pant , Douglas W. Young , Joseph R. Breivogel , Konstantin Volodarski , Leon Volfovski
- 申请人地址： CA Fremont
- 专利权人： Lam Research Corporation
- 当前专利权人： Lam Research Corporation
- 当前专利权人地址： CA Fremont
- 主分类号： B24B21/20
- IPC分类号： B24B21/20 ; B24B37/04
摘要：
The present invention describes an apparatus and method for aligning a pad/belt on a roller for use in chemical mechanical polishing using linear planarization. The present invention comprises an alignment sensor that senses the alignment of the pad/belt. The present invention additionally comprises a tensioner that tensions the pad/belt on the roller. And, a controller that controls the alignment of the pad/belt on the roller by controlling the tensioner.
公开/授权文献
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