发明授权
- 专利标题: Non-contact, zero-flux temperature sensor
- 专利标题(中): 非接触式零通量温度传感器
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申请号: US768915申请日: 1996-12-17
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公开(公告)号: US5884235A公开(公告)日: 1999-03-16
- 发明人: Jon L. Ebert
- 申请人: Jon L. Ebert
- 申请人地址: CA Sunnyvale
- 专利权人: Integrated Systems, Inc.
- 当前专利权人: Integrated Systems, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: G01K1/20
- IPC分类号: G01K1/20 ; G01J5/00 ; G01K1/16 ; G01K13/00 ; H01L21/66 ; G01J5/12
摘要:
A method and system are disclosed for measuring a temperature of a body in a non-contact mode based on heat flux measurement. The system includes a temperature measurement apparatus to be positioned in close proximity to a body for measuring the temperature of the body. The temperature measurement apparatus comprises a thermally conducting element, a first and a second temperature sensor, and a temperature modulation arrangement. The first and second temperature sensors are mounted in the conducting element and each measures a temperature of the conducting element. The temperature modulation arrangement modulates the temperature of the conducting element until the temperatures at the first and the second temperature sensors are substantially the same. When these temperatures are equalized, heat flux into the conducting element is zero and the temperature of the conducting element represents the temperature of the body. The apparatus thus enables accurate non-contact temperature measurement of a body.
公开/授权文献
- UST965001I4 Dyestuff waste water purification 公开/授权日:1977-12-06
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