发明授权
- 专利标题: Integrated circuit inductor
- 专利标题(中): 形成集成电路环形电感的方法
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申请号: US949314申请日: 1997-10-14
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公开(公告)号: US5884990A公开(公告)日: 1999-03-23
- 发明人: Joachim Norbert Burghartz , Daniel Charles Edelstein , Christopher Vincent Jahnes , Cyprian Emeka Uzoh
- 申请人: Joachim Norbert Burghartz , Daniel Charles Edelstein , Christopher Vincent Jahnes , Cyprian Emeka Uzoh
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: H01F17/00
- IPC分类号: H01F17/00 ; H01F17/06 ; H01F27/28 ; H01F30/16 ; H01F41/04 ; H01L23/522 ; H01F5/00 ; H01F7/06
摘要:
High quality factor (Q) spiral and toroidal inductor and transformer are disclosed that are compatible with silicon very large scale integration (VLSI) processing, consume a small IC area, and operate at high frequencies. The spiral inductor has a spiral metal coil deposited in a trench formed in a dielectric layer over a substrate. The metal coil is enclosed in ferromagnetic liner and cap layers, and is connected to an underpass contact through a metal filled via in the dielectric layer. The spiral inductor also includes ferromagnetic cores lines surrounded by the metal spiral coil. A spiral transformer is formed by vertically stacking two spiral inductors, or placing them side-by-side over a ferromagnetic bridge formed below the metal coils and cores lines. The toroidal inductor includes a toroidal metal coil with a core having ferromagnetic strips. The toroidal metal coil is segmented into two coils each having a pair of ports to form a toroidal transformer.
公开/授权文献
- US4230770A Metal photopolymer substrates 公开/授权日:1980-10-28
信息查询
IPC分类:
H | 电学 |
H01 | 基本电气元件 |
H01F | 磁体;电感;变压器;磁性材料的选择 |
H01F17/00 | 信号类型的固定电感器 |