- 专利标题: Micromachined integrated opto-flow gas/liquid sensor
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申请号: US55621申请日: 1998-04-06
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公开(公告)号: US5886249A公开(公告)日: 1999-03-23
- 发明人: Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
- 申请人: Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
- 申请人地址: MN Minneapolis
- 专利权人: Honeywell Inc.
- 当前专利权人: Honeywell Inc.
- 当前专利权人地址: MN Minneapolis
- 主分类号: G01N21/03
- IPC分类号: G01N21/03 ; G01N21/17 ; G01N21/35 ; G01N21/37 ; G01N21/33
摘要:
A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.
公开/授权文献
- USD390233S Radio 公开/授权日:1998-02-03