发明授权
US5888126A Polishing apparatus including turntable with polishing surface of
different heights
失效
抛光装置包括具有不同高度的抛光表面的转台
- 专利标题: Polishing apparatus including turntable with polishing surface of different heights
- 专利标题(中): 抛光装置包括具有不同高度的抛光表面的转台
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申请号: US590836申请日: 1996-01-24
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公开(公告)号: US5888126A公开(公告)日: 1999-03-30
- 发明人: Masayoshi Hirose , Yoshimi Sasaki , Akira Ogata , Seiji Ishikawa , Tamami Takahashi , Hirokuni Hiyama , Yutaka Wada
- 申请人: Masayoshi Hirose , Yoshimi Sasaki , Akira Ogata , Seiji Ishikawa , Tamami Takahashi , Hirokuni Hiyama , Yutaka Wada
- 申请人地址: JPX Tokyo
- 专利权人: Ebara Corporation
- 当前专利权人: Ebara Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-028722 19950125; JPX7-206594 19950720
- 主分类号: B24B37/005
- IPC分类号: B24B37/005 ; B24D13/14 ; H01L21/304 ; B24B29/02
摘要:
A polishing apparatus includes a turntable with an abrasive cloth mounted on an upper surface thereof, and a top ring disposed above the turntable for supporting a workpiece to be polished and pressing the workpiece against the abrasive cloth under a predetermined pressure. The turntable and the top ring are movable relatively to each other to polish a surface of the workpiece supported by the top ring with the abrasive cloth. The abrasive cloth has a projecting region on a surface thereof for more intensive contact with the workpiece than other surface regions of the abrasive cloth. The projecting region has a smaller dimension in a radial direction of the turntable than a diameter of the workpiece when the projecting region is held in contact with the workpiece. A position of the projecting region is determined on the basis of an area in which the projecting region acts on the workpiece.
公开/授权文献
- US4002548A Active Grignard electrode 公开/授权日:1977-01-11