Polishing apparatus
    4.
    发明授权
    Polishing apparatus 失效
    抛光设备

    公开(公告)号:US5716264A

    公开(公告)日:1998-02-10

    申请号:US683424

    申请日:1996-07-18

    CPC分类号: B24B53/017

    摘要: A polishing apparatus is employed to polish an object to be polished by urging the surface of the object to be polished against the surface of a polishing cloth and causing a relative movement therebetween, while supplying a polishing liquid into an area between the object to be polished and the polishing cloth. A plurality of nozzles spray respective fluid jets to strike against the surface of the cloth. The plurality of nozzles include more than one type of nozzle which vary flow velocity, flow rate, angle of spray, and cross-sectional configuration of a jet. The plurality of nozzles have axes positioned at a location at different distances from the rotation axis of the polishing cloth.

    摘要翻译: 抛光装置用于通过将待抛光物体的表面推压在抛光布的表面上并在其之间相对移动,同时将抛光液体提供到待抛光对象之间的区域中来抛光待抛光物体 和抛光布。 多个喷嘴喷射相应的流体射流以抵靠布的表面。 多个喷嘴包括不止一种类型的喷嘴,其改变流速,流速,喷射角度和射流的横截面构造。 多个喷嘴具有位于与抛光布的旋转轴线不同的距离处的轴线。

    Revolving drum polishing apparatus
    5.
    发明授权
    Revolving drum polishing apparatus 失效
    滚筒抛光装置

    公开(公告)号:US5643056A

    公开(公告)日:1997-07-01

    申请号:US550117

    申请日:1995-10-30

    CPC分类号: B24B7/228 B24B29/02 B24B37/04

    摘要: A drum-type polishing apparatus for producing a flat mirror polish on an object such as a semiconductor wafer, is capable of three degrees of freedom of movement of a drum member with respect to the wafer. The relative movements can be made, successively or simultaneously, at right angles to an axis of the drum, parallel to the surface of the wafer, as well as at any desired angular orientations. Combined with a follower device to provide automatic compensation for unevenness in pressing pressure applied to the wafer during polishing, the polishing apparatus offers outstanding uniformity in polishing quality and high productivity, even for large diameter wafers, with a comparatively modest investment in both facility space and equipment cost.

    摘要翻译: 用于在诸如半导体晶片的物体上制造平面镜抛光的滚筒式抛光装置能够使鼓构件相对于晶片具有三个自由度的移动。 相对运动可以连续或同时地与滚筒的轴线成直角,平行于晶片的表面以及任何期望的角度取向。 结合跟随装置,为抛光期间对晶片施加的压力压力的不均匀性提供自动补偿,抛光装置即使对于大直径晶片也具有优异的抛光质量均匀性和高生产率,在设备空间和 设备成本

    Polishing apparatus
    7.
    发明授权
    Polishing apparatus 失效
    抛光设备

    公开(公告)号:US5476414A

    公开(公告)日:1995-12-19

    申请号:US124550

    申请日:1993-09-22

    摘要: A workpiece such as a semiconductor wafer is supported on a top ring and polished by an abrasive cloth on a turntable while the top ring is being pressed against the turntable and the turntable and the top ring are being rotated. The top ring is coupled to a top ring drive shaft, coupled to a pressure cylinder for pressing the top ring, and to a motor for rotating the top ring. A spherical bearing is interposed between the top ring and the top ring drive shaft for allowing the top ring to align with the upper surface of the moving turntable. A torque transmitting mechanism is operatively coupled between the top ring and the top ring drive shaft for rotating the top ring in synchronization with the top ring drive shaft.

    摘要翻译: 诸如半导体晶片的工件被支撑在顶环上并且通过研磨布在转盘上抛光,同时顶环被压靠在转台上,并且转台和顶环正在旋转。 顶环联接到顶环驱动轴,联接到用于按压顶环的压力缸,以及用于旋转顶环的电动机。 在顶环和顶环驱动轴之间插入有球面轴承,用于允许顶环与活动转台的上表面对准。 扭矩传递机构可操作地联接在顶环和顶环驱动轴之间,用于与顶环驱动轴同步地旋转顶环。

    Motor-driven electric timer
    9.
    发明授权
    Motor-driven electric timer 失效
    电动电动定时器

    公开(公告)号:US4524252A

    公开(公告)日:1985-06-18

    申请号:US435219

    申请日:1982-10-19

    IPC分类号: G04F3/06 H01H7/00

    CPC分类号: G04F3/06 Y10T74/2106

    摘要: A motor-driven electric timer consists of a motor, a reduction gear assembly for reducing a rotational speed from the motor to a predetermined speed, an externally actuatable slider having at one side wall thereof a rack, a clutch mechanism consisting of a pinion gear driven by the reduction gear assembly for driving the rack and a spring wire disengageably biasing the pinion gear for engagement with the rack, a switching lever member following a side wall of the slider, a contact member actuated by the switching lever member, and a flat-shaped housing enclosing the timer.

    摘要翻译: 电动电动定时器包括电动机,用于将电动机的转速降低到预定速度的减速装置组件,具有在其一个侧壁上的机架的外部可致动的滑块,由小齿轮驱动的离合器机构 通过用于驱动齿条的减速齿轮组件和能够与小齿轮可分离地偏置地与齿条接合的弹簧丝线,沿着滑块的侧壁,由切换杆构件致动的接触构件和平板状构件的切换杆构件, 包围定时器的外壳。