发明授权
- 专利标题： Method for microfabricating diamond
- 专利标题（中）： 金刚石微加工方法
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申请号： US86561申请日： 1998-05-29
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公开(公告)号： US5888846A公开(公告)日： 1999-03-30
- 发明人: Koichi Miyata , Koji Kobashi , Kohei Suzuki , Toshihisa Nozawa
- 申请人： Koichi Miyata , Koji Kobashi , Kohei Suzuki , Toshihisa Nozawa
- 申请人地址： JPX Kobe
- 专利权人： Kabushiki Kaisha Kobe Seiko Sho
- 当前专利权人： Kabushiki Kaisha Kobe Seiko Sho
- 当前专利权人地址： JPX Kobe
- 优先权： JPX9-140680 19970529
- 主分类号： C30B29/04
- IPC分类号： C30B29/04 ; B81C1/00 ; C30B33/08 ; H01L21/04 ; H01L21/00 ; H01L21/335 ; H01L21/84
摘要：
A method for microfabricating diamond includes the steps of: forming a resist layer composed of a ladder silicone spin-on glass material on the surface of diamond; performing lithography, in which the resist layer is irradiated with an electron beam or an ion beam in a given pattern; developing the resist layer to form the given pattern; and etching diamond by an ECR plasma etching method or a high-frequency plasma etching method.
公开/授权文献
- USD412026S Faucet handle 公开/授权日：1999-07-13
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