发明授权
US5888867A Non-uniform threshold voltage adjustment in flash eproms through gate
work function alteration
失效
通过门功功能改变,闪光eprom中的非均匀阈值电压调整
- 专利标题: Non-uniform threshold voltage adjustment in flash eproms through gate work function alteration
- 专利标题(中): 通过门功功能改变,闪光eprom中的非均匀阈值电压调整
-
申请号: US23241申请日: 1998-02-13
-
公开(公告)号: US5888867A公开(公告)日: 1999-03-30
- 发明人: Janet Wang , Scott D. Luning , Vei-Han Chan , Nicholas H. Tripsas
- 申请人: Janet Wang , Scott D. Luning , Vei-Han Chan , Nicholas H. Tripsas
- 申请人地址: CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/3215 ; H01L21/336 ; H01L29/423 ; H01L29/49 ; H01L21/8247
摘要:
Aspects for forming a Flash EPROM cell with an adjustable threshold voltage are described. In a method aspect, the method includes forming a substrate structure to establish a foundation for cell formation, and forming a gate structure with a floating gate layer comprising polysilicon-germanium (poly-SiGe) of a non-uniform Ge concentration on the substrate structure. The method further includes forming source and drain regions within the substrate structure, the drain region having a different threshold voltage than the source region. In a further aspect, a Flash EPROM cell with an adjustable threshold voltage includes a substrate structure as a foundation for the cell. The cell further includes a gate structure on the substrate structure, the gate structure comprising a floating gate layer of polysilicon-germanium (poly-SiGe) of non-uniform Ge concentration. Additionally, source and drain regions are included in the substrate structure bordering the gate structure, the drain region having a differing threshold voltage than the source region.
公开/授权文献
- US5411987A Fungicidal substituted amino acid amides 公开/授权日:1995-05-02
信息查询
IPC分类: