发明授权
- 专利标题: Solder bump for flip chip assembly and method of its fabrication
- 专利标题(中): 用于倒装芯片组装的焊接凸块及其制造方法
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申请号: US849035申请日: 1997-07-02
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公开(公告)号: US5906312A公开(公告)日: 1999-05-25
- 发明人: Elke Zakel , Rolf Aschenbrenner
- 申请人: Elke Zakel , Rolf Aschenbrenner
- 申请人地址: DEX Munich
- 专利权人: Franunhofer-Gesellschaft zur Foerde-rung der angwandten Forschung e.V.
- 当前专利权人: Franunhofer-Gesellschaft zur Foerde-rung der angwandten Forschung e.V.
- 当前专利权人地址: DEX Munich
- 优先权: DEX4442960 19941202
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L23/12 ; H01L23/485 ; H01R4/02
摘要:
The invention relates to a solder bump for flip-chip assembly and consist of a core containing a high proportion of a soft and electrically well conducting metal, particularly gold, and a diffusion barrier layer deposited on the solder bump core. As is known, the diffusion barrier layer functions to prevent intermetallic compounds between the gold of the solder bump core and the solder material, especially tin-lead solder material, which would otherwise reduce the mechanical stability of the solder connection. A pre-treatment with a cleaning solvent or in a nucleation bath has hitherto been necessary. to provide a good bond between the diffusion barrier layer, usually nickel, and the solder bump core. With the invention, this pretreatment process step is no longer necessary, since small amounts of a material are added to the solder bump core which acts as a nucleation material for the diffusion barrier layer. Such solder bump cores may, for instance, very easily and cost-efficiently be fabricated mechanically as ball bumps (with 98% of gold and 2% of palladium).
公开/授权文献
- US5295605A Shutter device for pressure container 公开/授权日:1994-03-22
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