发明授权
- 专利标题： Dishing resistance
- 专利标题（中）： 耐磨性
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申请号： US940808申请日： 1997-09-30
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公开(公告)号： US5928959A公开(公告)日： 1999-07-27
- 发明人: Kai Huckels , Matthias Ilg
- 申请人： Kai Huckels , Matthias Ilg
- 申请人地址： DEX Munich
- 专利权人： Siemens Aktiengesellschaft
- 当前专利权人： Siemens Aktiengesellschaft
- 当前专利权人地址： DEX Munich
- 主分类号： H01L21/3205
- IPC分类号： H01L21/3205 ; H01L21/304 ; H01L21/3105 ; H01L21/321 ; H01L21/302
摘要：
Fabrication of devices that produces a surface with reduced dishing caused by polishing. The reduced dishing is the result of forming a first layer that partially covers a complex surface topography and a second layer the covers the surface topography. The second layer being more resistant to polishing than the first so as to reduce dishing in the wide spaces of the complex topography.
公开/授权文献
- USD342225S Wiper arm cover 公开/授权日：1993-12-14
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