Invention Grant
US5930594A Method of manufacturing rigid floating microstructure elements and a
device equipped with such elements
失效
制造刚性浮动微结构元件的方法和装备有这些元件的装置
- Patent Title: Method of manufacturing rigid floating microstructure elements and a device equipped with such elements
- Patent Title (中): 制造刚性浮动微结构元件的方法和装备有这些元件的装置
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Application No.: US676631Application Date: 1996-07-10
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Publication No.: US5930594APublication Date: 1999-07-27
- Inventor: Michel Vilain
- Applicant: Michel Vilain
- Applicant Address: FRX Paris
- Assignee: Commissariat a l'Energie
- Current Assignee: Commissariat a l'Energie
- Current Assignee Address: FRX Paris
- Priority: FRX9508525 19950713
- Main IPC: G01J5/20
- IPC: G01J5/20 ; B81B3/00 ; F15C5/00 ; H01L21/302 ; H01L21/3065 ; H01L49/00 ; H01L21/00
Abstract:
A method of manufacturing elements of floating rigid microstructures and a device equipped with such elements.This method of manufacturing at least one element of a microstructure (104, 116) in a substrate including a stacking of a support layer (100), a layer (102) of sacrificial material and a structure layer (104) comprises the following steps:a) etching in the substrate a relief structure (108) with lateral sides (110a, 110b)b) formation of a so-called rigidity lining (116) on the lateral sides (110a, 110b),c) removal of the sacrificial material from the relief structure (108) in order to release the floating microstructure.
Public/Granted literature
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