公开(公告)号：US08866082B2

公开(公告)日：2014-10-21

申请号：US13058968

申请日：2009-10-06

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J5/00 ,  G01J5/02 ,  G01J5/20 ,  H01L31/09 ,  G01J5/08

CPC classification number: G01J5/20 ,  G01J5/02 ,  G01J5/023 ,  G01J5/0235 ,  G01J5/08 ,  G01J5/0875 ,  H01L31/09

Abstract: This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).

Abstract translation: 该电磁辐射检测器由多个基本检测微位点组成，每个元件包括具有对所述辐射敏感的膜（2）的微检测器，并且每个被提供在微腔或微胶囊中 通过基板（1），由用作对所述辐射透明的窗口的上壁（5）和侧壁（4），所述膜（2）借助于至少两个 支撑臂（6），其包括导电层（17），所述臂（6）的端部锚固在侧壁（4）中。

公开(公告)号：US20120037805A1

公开(公告)日：2012-02-16

申请号：US13277661

申请日：2011-10-20

Applicant: Benoit DUPONT ,  Michel Vilain

Inventor： Benoit DUPONT ,  Michel Vilain

IPC: G01J5/22

CPC classification number: G01J5/24 ,  G01J5/22 ,  H04N5/33 ,  H04N5/3651 ,  H04N5/3655

Abstract: A device for detecting infrared radiation comprising an array of bolometers for detecting radiation; and in order to read each bolometer, a signal shaping circuitry comprising: a circuitry capable of biasing the bolometer at a predetermined voltage in order to make current flow therethrough; a circuitry capable of generating a common-mode current; and a circuitry capable of integrating the difference between the current that flows through the bolometer and the common-mode current. According to the invention, the device comprises a circuitry capable of injecting current into each bolometer in order to shift its resistance by a predetermined quantity that depends on its offset, current injection being performed prior to readout biasing of the bolometer and the shift being performed according to the direction in which the bolometer's resistance varies as a function of temperature. In addition, correction circuitry is capable of shifting the resistances of bolometers towards a common value.

Abstract translation: 一种用于检测红外辐射的装置，包括用于检测辐射的辐射计阵列; 并且为了读取每个测辐射热谱仪，信号整形电路包括：能够以预定电压偏置测辐射热计的电路，以使电流流过其中; 能够产生共模电流的电路; 以及能够整合流经测辐射热计的电流与共模电流之间的差异的电路。 根据本发明，该装置包括能够将电流注入每个测辐射热计的电路，以便将其电阻移动预定量，该预定量取决于其偏移量，在测辐射热计读数偏置之前执行电流注入，并根据 测辐射热计的阻力随温度的变化而变化。 此外，校正电路能够将辐射计的电阻转换成公共值。

公开(公告)号：US07999229B2

公开(公告)日：2011-08-16

申请号：US12328915

申请日：2008-12-05

Applicant: Beno{hacek over (i)}t Dupont ,  Michel Vilain

Inventor： Beno{hacek over (i)}t Dupont ,  Michel Vilain

IPC: G01J5/00

CPC classification number: G01J5/24 ,  H04N5/3651

Abstract: The invention relates to a device for detecting an electromagnetic radiation comprising a resistive imaging bolometer sensitive to the electromagnetic radiation to be detected, intended to be connected electrically to a signal shaping circuit, and a resistive common mode rejection bolometer that is associated electrically with the imaging bolometer, so that the current flowing through the common mode rejection bolometer is subtracted from the current flowing through the imaging bolometer, wherein it comprises means for controlling the resistance of the common mode rejection bolometer by injecting current therein.

Abstract translation: 本发明涉及一种用于检测电磁辐射的装置，其包括对要被检测的电磁辐射敏感的电阻成像测辐射热计，该电磁辐射计意图与信号整形电路电连接;以及电阻式共模抑制测辐射热谱仪，其与成像电 测量流量计，使流过共模抑制辐射热计的电流从流过成像测辐射热计的电流中减去，其中包括用于通过在其中注入电流来控制共模抑制辐射热计的电阻的装置。

公开(公告)号：US07999227B2

公开(公告)日：2011-08-16

申请号：US12170669

申请日：2008-07-10

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J5/02

CPC classification number: G01J5/20 ,  H01L27/14649

Abstract: This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.

Abstract translation: 该电磁辐射检测器包括反射基板和至少一个检测元件，该检测元件包括对所述辐射敏感并悬浮在基底上方的膜。 膜与至少一个检测元件和基底之间的距离是可变的，所述距离具有预定的空间分布，其适合于使至少一个预定波长范围内的辐射检测器的响应的快速变化最小化。

公开(公告)号：US20090266986A1

公开(公告)日：2009-10-29

申请号：US12398427

申请日：2009-03-05

Applicant: Michel VILAIN

Inventor： Michel VILAIN

IPC: G01J5/00

CPC classification number: G01J5/02 ,  G01J5/023 ,  G01J5/20

Abstract: A detector for detecting electromagnetic radiation includes a substrate and at least one microstructure including a radiation-sensitive membrane extending substantially opposite and away from the substrate. The membrane is mechanically attached to at least two longilinear, collinear retention elements, at least one of which is mechanically connected to the substrate by an intermediate post. The membrane is in electrical continuity with the substrate. At least two collinear legs are attached to each other at the level of their ends which are attached to the membrane by a mechanical connector which is substantially co-planar with the legs and membrane. The other end of at least one of the legs is integral with a rigid cross piece which is substantially co-planar with the legs and extends substantially at right angles relative to the main dimension of the legs. The cross piece is integral with the post which is integral with the substrate.

Abstract translation: 用于检测电磁辐射的检测器包括基底和至少一个微结构，包括基本相反并远离基底延伸的辐射敏感膜。 膜被机械连接到至少两个长线，共线保持元件，其中至少一个通过中间柱机械地连接到基底。 膜与衬底电连续。 至少两根共线腿在其端部的水平处彼此附接，该端部通过与腿和膜基本共面的机械连接器附接到膜。 腿中的至少一个腿的另一端与刚性横梁成一体，该刚性横梁基本上与腿部共面并相对于腿的主要尺寸基本上成直角延伸。 横梁与与基板成一体的柱是一体的。

公开(公告)号：US20090020702A1

公开(公告)日：2009-01-22

申请号：US12170669

申请日：2008-07-10

Applicant: Michel VILAIN

Inventor： Michel VILAIN

IPC: G01J5/02 ,  H01L31/18

CPC classification number: G01J5/20 ,  H01L27/14649

Abstract: This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.

Abstract translation: 该电磁辐射检测器包括反射基板和至少一个检测元件，该检测元件包括对所述辐射敏感并悬浮在基底上方的膜。 膜与至少一个检测元件和基底之间的距离是可变的，所述距离具有预定的空间分布，其适合于使至少一个预定波长范围内的辐射检测器的响应的快速变化最小化。

公开(公告)号：US07288765B2

公开(公告)日：2007-10-30

申请号：US11191760

申请日：2005-07-28

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J5/00

CPC classification number: G01J5/20 ,  G01J5/023

Abstract: This device for detecting infrared radiation comprises a one or two-dimensional array of elementary bolometric detectors, that are electrically connected to a readout circuit (1), which is associated with a compensation structure intended to divert most of the background or common-mode current that flows through each of the bolometric detectors in the array.The compensation structure consists of a layer that incorporates at least one bolometric material (8) extending between two electrical connection areas (3, 6, 7) linked to the readout circuit (1).The layer that incorporates the bolometric material (8) that constitutes the compensation structure is itself in thermal contact with the substrate that constitutes the readout circuit (1) outside the electrical connection areas (3, 6, 7).

Abstract translation: 用于检测红外辐射的装置包括基本测温检测器的一维或二维阵列，其与读出电路（1）电连接，读出电路（1）与旨在转移大部分背景或共模电流的补偿结构相关联 其流过阵列中的每个测温探测器。 所述补偿结构包括一层，所述层包括至少一个在与所述读出电路（1）连接的两个电连接区域（3,6,7）之间延伸的测温材料（8）。 结合构成补偿结构的测温材料（8）的层本身与组成读出电路（1）的基板在电连接区域（3,6,7）之外热接触。

公开(公告)号：US07241998B2

公开(公告)日：2007-07-10

申请号：US10482237

申请日：2002-06-18

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J5/00

CPC classification number: G01J5/02 ,  G01J5/023 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/04 ,  G01J5/046 ,  G01J5/20

Abstract: The invention concerns a microbolometer comprising a suspended part containing radiation-sensitive elements and consisting of a set of first zones and a set of second zones, the two sets being superimposed; furthermore, the materials constituting said zones and have thermal expansion coefficients sufficiently different for said suspended part to be deformed under the effect of a rise in temperature to be urged into contact with the substrate when the contact zone reaches a temperature Tc less than the destruction temperature Td of the microbolometer. The invention is applicable to radiation detectors comprising an assembly of such microbolometers, and to various appliances comprising at least such a radiation detector.

Abstract translation: 本发明涉及一种包括一个包含辐射敏感元件并由一组第一区域和一组第二区域组成的悬置部分的微电热计，两组叠加; 此外，构成所述区域的材料具有充分不同的热膨胀系数，使得当接触区域达到温度T℃时，在温度升高的作用下使所述悬浮部分变形，以被迫与基底接触， / SUB>小于微测热计的破坏温度T 。 本发明可应用于包括这种微电热计的组件的辐射探测器以及包括至少这种辐射探测器的各种器具。

公开(公告)号：US07138630B2

公开(公告)日：2006-11-21

申请号：US10954828

申请日：2004-09-30

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J5/02

CPC classification number: H01L27/14692 ,  G01J5/20 ,  H01L27/14669 ,  H01L27/14683

Abstract: A bolometric detector including a sensitive part having one or more layers of a sensitive material, the resistivity of which varies with temperature, electrodes isolated from one another, also acting as infrared radiation absorbers, the electrodes being in contact with the sensitive material over at least part of their surface, at least one support region for supporting the sensitive part, acting so as to position the sensitive part, and acting as an electrical conductor, in relation to a read circuit associated with the bolometric detector, and at least one thermal insulation structure electrically and mechanically connecting each support region to the sensitive part. The regions of sensitive material not in contact with the electrodes have at least one corrugation oriented along the direction perpendicular to the plane containing the sensitive part of the bolometric detector.

Abstract translation: 一种辐射探测器，包括具有一层或多层敏感材料的敏感部件，其电阻率随温度变化，彼此隔离的电极，也用作红外线辐射吸收器，电极至少与敏感材料接触 其表面的一部分，用于支撑敏感部分的至少一个支撑区域，其作用为定位敏感部分，并且用作相对于与测温检测器相关联的读取电路的电导体，以及至少一个绝热 结构将每个支撑区域电气和机械地连接到敏感部件。 不与电极接触的敏感材料区域沿着垂直于包含测温检测器的敏感部分的平面的方向具有至少一个波纹。

公开(公告)号：US20060060786A1

公开(公告)日：2006-03-23

申请号：US11191760

申请日：2005-07-28

Applicant: Michel Vilain

Inventor： Michel Vilain

IPC: G01J5/00

CPC classification number: G01J5/20 ,  G01J5/023

Abstract: This device for detecting infrared radiation comprises a one or two-dimensional array of elementary bolometric detectors, that are electrically connected to a readout circuit (1), which is associated with a compensation structure intended to divert most of the background or common-mode current that flows through each of the bolometric detectors in the array. The compensation structure consists of a layer that incorporates at least one bolometric material (8) extending between two electrical connection areas (3, 6, 7) linked to the readout circuit (1). The layer that incorporates the bolometric material (8) that constitutes the compensation structure is itself in thermal contact with the substrate that constitutes the readout circuit (1) outside the electrical connection areas (3, 6, 7).

Abstract translation: 用于检测红外辐射的装置包括基本测温检测器的一维或二维阵列，其与读出电路（1）电连接，读出电路（1）与旨在转移大部分背景或共模电流的补偿结构相关联 其流过阵列中的每个测温探测器。