Invention Grant
- Patent Title: Epitaxial passivation of group II-VI infrared photodetectors
- Patent Title (中): II-VI族红外光电探测器的外延钝化
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Application No.: US174745Application Date: 1988-03-29
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Publication No.: US5936268APublication Date: 1999-08-10
- Inventor: Charles A. Cockrum , Peter R. Bratt , David R. Rhiger , Owen K. Wu
- Applicant: Charles A. Cockrum , Peter R. Bratt , David R. Rhiger , Owen K. Wu
- Applicant Address: MA Lexington
- Assignee: Raytheon Company
- Current Assignee: Raytheon Company
- Current Assignee Address: MA Lexington
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/0328 ; H01L31/00
Abstract:
An array 1 of photodiodes 2 is comprised of a Group II-VI material, such as HgCdTe, which may be selectively doped to form a plurality of diode junctions. Array 1 is comprised of a plurality of photodiodes 2 which are disposed in a regular, two dimensional array. Incident IR radiation, which may be long wavelength, medium wavelength or short wavelength (LWIR, MWIR or SWIR) radiation, is incident upon a surface of the array 1. The array 1 comprises a radiation absorbing base layer 3 of Hg.sub.1-x Cd.sub.x Te semiconducting material, the value of x determining the responsivity of the array to either LWIR, MWIR or SWIR. Each of the photodiodes 2 is defined by a mesa structure, or cap layer 3; or the array 1 of photodiodes 2 may be a planar structure. Each of the photodiodes 2 is provided with an area of contact metallization 4 upon a top surface thereof, the metallization serving to electrically couple an underlying photodiode to a readout device. The upper surface of the array 1 is provided with, in accordance with the invention, a passivation layer 5 comprised of an epitaxial layer of Group II-VI material which forms a heterostructure with the underlying Group II-VI material and which has a wider bandgap than the underlying Hg(.sub.1-x)Cd.sub.x Te, thereby beneficially repelling both holes and electrons from the diode junctions.
Public/Granted literature
- US6069491A Integrated buffer circuit Public/Granted day:2000-05-30
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