发明授权
- 专利标题: Micromechanical accelerometer
- 专利标题(中): 微机械加速度计
-
申请号: US875384申请日: 1997-10-03
-
公开(公告)号: US5939632A公开(公告)日: 1999-08-17
- 发明人: David Frank Moore , Stuart Clyde Burgess , Heather Klaubert , Hiang-Swee Chiang , Narito Shibaike , Takashi Kiriyami
- 申请人: David Frank Moore , Stuart Clyde Burgess , Heather Klaubert , Hiang-Swee Chiang , Narito Shibaike , Takashi Kiriyami
- 申请人地址: GBX Cambridge JPX Kadoma JPX Tokyo
- 专利权人: Cambridge University Technical Services Limited,Matsushita Electric Industrial Co. Ltd.,The University of Tokyo
- 当前专利权人: Cambridge University Technical Services Limited,Matsushita Electric Industrial Co. Ltd.,The University of Tokyo
- 当前专利权人地址: GBX Cambridge JPX Kadoma JPX Tokyo
- 优先权: GBX9426363 19941229
- 主分类号: G01P15/08
- IPC分类号: G01P15/08 ; H01L29/84
摘要:
There is disclosed an accelerometer comprising a substrate, a proof mass mounted to the substrate for movement in a first direction perpendicular to the plane of the substrate, the proof mass carrying a first sensing electrode, a second sensing electrode mounted relative to the substrate, wherein the first and second sensing electrodes comprise surfaces extending at an angle relative to the substrate and defining between them a sensing gap the width of which varies with movement of the proof mass in the first direction.
公开/授权文献
- USD299032S Fertilizer applicator blade shank insert 公开/授权日:1988-12-20