Hybrid chip process
    1.
    发明授权
    Hybrid chip process 失效
    混合芯片工艺

    公开(公告)号:US06360043B1

    公开(公告)日:2002-03-19

    申请号:US09341229

    申请日:1999-10-18

    IPC分类号: G02B630

    摘要: The present case concerns the manufacture of hybrid electrooptical chips. A substrate is treated so that it can both provide locations for electrooptical components and be etched so as to generate grooves in which optical fibers can be mounted. During the etching of the grooves any electrooptical component already mounted on the substrate is protected from damage by the etchant by a protective coating. A feature is that optical fibers can be mounted with their cores above the surface of the wafer.

    摘要翻译: 本案涉及制造混合电光芯片。 处理基板使得其可以提供电光学部件的位置并且被蚀刻以便产生可以安装光纤的凹槽。 在蚀刻凹槽期间,已经安装在基板上的任何电光学部件都被保护层免受蚀刻剂的损伤。 其特征在于,光纤可以以其芯在芯片的表面上方安装。

    Liquid transfer system
    3.
    发明授权
    Liquid transfer system 失效
    液体转移系统

    公开(公告)号:US06723569B1

    公开(公告)日:2004-04-20

    申请号:US09831132

    申请日:2001-08-13

    IPC分类号: G01N110

    摘要: A dropping tool for transferring drops of a liquid onto a substrate wherein a surface of the dropping tool for contact with the liquid has a first region which exhibits an affinity to the liquid to be transferred directly surrounded by a second region which exhibits a lower affinity to the liquid to be transferred than the first region; the topography of the first and second regions and the relative affinities of the first and second regions for the liquid to be transferred being selected such that when the dropping tool is dipped into and then removed from a source of the liquid to be transferred, the liquid adheres to the first region without substantially any adherence of the liquid to the second region. A dropping tool for transferring drops of liquid onto a substrate, the dropping tool comprising a tip, at least one surface tapered towards the tip, and a capillary channel which leads from a position of the tapered surface remote from the tip to a reservoir located within the dropping tool. A method for transferring drops of liquid carried on a dropping tool onto a substrate to form an ordered array of drops thereon wherein the drop of liquid is transferred without contacting the dropping tool with the substrate either directly or indirectly via the drop of liquid.

    摘要翻译: 一种用于将液体滴转移到基底上的滴液工具,其中用于与液体接触的滴液工具的表​​面具有第一区域,该第一区域对被转移的液体具有亲和性,该第一区域直接由对第 待转移的液体比第一区域; 选择第一和第二区域的形状以及用于待转移的液体的第一和第二区域的相对亲和力,使得当将滴液工具浸入并且然后从待转移的液体的源中移除时,液体 粘附到第一区域而基本上没有液体粘附到第二区域。 一种用于将液滴滴落到基底上的滴液工具,该滴液工具包括一个尖端,至少一个朝尖端渐缩的表面,以及一个毛细通道,该锥形通道从锥形表面的远离尖端的位置引导到位于 滴滴工具。 一种用于将滴加工具上携带的液体液滴转移到基底上以在其上形成有序的液滴阵列的方法,其中一滴液体被转移,而不会直接或间接地通过滴液接触滴液工具与基底。

    Micromechanical sensor
    4.
    发明授权
    Micromechanical sensor 失效
    微机械传感器

    公开(公告)号:US5763782A

    公开(公告)日:1998-06-09

    申请号:US794488

    申请日:1997-02-04

    摘要: A micromechanical sensor has a plurality of sensing elements (14a-14d) which are supported at respective support regions (12a-12d). A first set of the sensing elements defines the sensing gap. In one arrangement this is defined by sensing elements supported by adjacent support regions. In another embodiment the sensing gap is defined between one sensing element and a reference beam formed by connection of the return legs of two diametrically opposed sensing elements. The sensing elements are substantially similar one to another and each sensing element comprises an outgoing elongate leg extending away from its associated support region and a return leg substantially parallel to the outgoing leg extending towards the support region. By providing sensing elements which are substantially similar in shape and arranged in this way, the effects of thin film stress are minimized.

    摘要翻译: 微机械传感器具有多个感测元件(14a-14d),其被支撑在相应的支撑区域(12a-12d)处。 感测元件的第一组限定了感测间隙。 在一种布置中,这由感测由相邻支撑区域支撑的元件限定。 在另一个实施例中,感测间隙限定在一个感测元件和通过两个直径相对的传感元件的返回支腿的连接形成的参考光束之间。 感测元件基本上彼此相似,并且每个感测元件包括远离其相关联的支撑区域延伸的输出细长支腿和基本上平行于朝向支撑区域延伸的输出支腿的返回支路。 通过提供基本相似的形状并以这种方式布置的感测元件,薄膜应力的作用被最小化。

    Micromechanical accelerometer
    5.
    发明授权
    Micromechanical accelerometer 失效
    微机械加速度计

    公开(公告)号:US5939632A

    公开(公告)日:1999-08-17

    申请号:US875384

    申请日:1997-10-03

    IPC分类号: G01P15/08 H01L29/84

    摘要: There is disclosed an accelerometer comprising a substrate, a proof mass mounted to the substrate for movement in a first direction perpendicular to the plane of the substrate, the proof mass carrying a first sensing electrode, a second sensing electrode mounted relative to the substrate, wherein the first and second sensing electrodes comprise surfaces extending at an angle relative to the substrate and defining between them a sensing gap the width of which varies with movement of the proof mass in the first direction.

    摘要翻译: PCT No.PCT / GB95 / 03018 Sec。 371日期1997年10月3日第 102(e)日期1997年10月3日PCT 1995年12月22日PCT PCT。 公开号WO96 / 21157 PCT 日期:1996年7月11日公开了一种加速度计,其包括基板,安装在基板上的检测质量沿垂直于基板平面的第一方向移动,检测质量携带第一检测电极,第二检测电极安装在相对 其中所述第一感测电极和所述第二感测电极包括相对于所述衬底以一定角度延伸的表面,并且在它们之间限定其宽度随所述第一方向上的所述证明块的移动而变化的感测间隙。