发明授权
- 专利标题: Electric field test of integrated circuit component
- 专利标题(中): 集成电路元件的电场测试
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申请号: US123149申请日: 1998-07-27
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公开(公告)号: US5942911A公开(公告)日: 1999-08-24
- 发明人: Franco Motika , Paul Motika , Phil Nigh
- 申请人: Franco Motika , Paul Motika , Phil Nigh
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R31/312 ; G01R31/26
摘要:
The manufacture of an integrated circuit chip includes testing the integrated circuit while an external electric field is applied to the integrated circuit to facilitate detection of open circuit type defects. The electric field may be provided by applying a high potential to a plate parallel to a plane of the integrated circuit or by applying a high potential to a probe and moving the probe across the surface of the integrated circuit chip to obtain information regarding the location of the defect. Use of a probe type electric field generator allows the approximate position of the defect to be determined. The invention enhances current testing and diagnostics methods for wafers, chips, and integrated circuit packages by allowing detection of floating net defects during other conventional tests.
公开/授权文献
- USD435276S Golf putter head 公开/授权日:2000-12-19
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