发明授权
- 专利标题: Method of fabricating a capacitor on a rugged stacked oxide layer
- 专利标题(中): 在坚固的堆叠氧化物层上制造电容器的方法
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申请号: US697622申请日: 1996-08-27
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公开(公告)号: US5960279A公开(公告)日: 1999-09-28
- 发明人: Kuang-Chao Chen , Tuby Tu
- 申请人: Kuang-Chao Chen , Tuby Tu
- 申请人地址: TWX Hsin-Chu
- 专利权人: Mosel Vitellic Incorporated
- 当前专利权人: Mosel Vitellic Incorporated
- 当前专利权人地址: TWX Hsin-Chu
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/8242
摘要:
The present invention relates to a stacked memory capacitor of a DRAM cell, particularly, relates to a DRAM cell having a memory capacitor whose storage electrode possesses a remarkably increase area without increasing its occupation area and the complexity of fabrication thereof. By disposing the storage electrode of the memory capacitor on a rugged stacked oxide layer, the area of the storage electrode is remarkably enlarged since the growing of the storage electrode made of a doped polysilicon layer is followed along the topography of the rugged stacked oxide layer, thereby, resulting in a rugged surface thereof. The entire rugged surface of the storage electrode is covered with a dielectric layer to form a plate electrode made of a doped polysilicon layer. The memory capacitor provided by the invention achieves a higher capacitance while maintaining the same occupation area and packing density as that of the conventional arts.
公开/授权文献
- US4110088A Apparatus and method for removal of pollutants from flue gas 公开/授权日:1978-08-29
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