发明授权
- 专利标题： Microwave plasma discharge device
- 专利标题（中）： 微波等离子体放电装置
-
申请号： US626451申请日： 1996-04-02
-
公开(公告)号： US5961851A公开(公告)日： 1999-10-05
- 发明人: Mohammad Kamarehi , Richard Pingree , Jianou Shi , Gerald Cox
- 申请人： Mohammad Kamarehi , Richard Pingree , Jianou Shi , Gerald Cox
- 申请人地址： MD Rockville
- 专利权人： Fusion Systems Corporation
- 当前专利权人： Fusion Systems Corporation
- 当前专利权人地址： MD Rockville
- 主分类号： C23F4/00
- IPC分类号： C23F4/00 ; H01J37/32 ; H01L21/302 ; H01L21/3065 ; H05H1/00
摘要：
A method of removing material from a substrate, and a plasma discharge device wherein a plasma is excited by microwave energy having an electric field which is azimuthally and axially uniform in relation to the plasma tube. The microwave cavity is divided longitudinally into sections by conducting partitions, each of which is separately fed with microwave energy, and the plasma tube extends through openings in the partitions.
公开/授权文献
- US5044385A Ponytail holder and method of making same 公开/授权日：1991-09-03
信息查询
IPC分类:
