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    Microwave plasma discharge device
    1.
    发明授权
    Microwave plasma discharge device 失效
    微波等离子体放电装置

    公开(公告)号：US5961851A

    公开(公告)日：1999-10-05

    申请号：US626451

    申请日：1996-04-02

    申请人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi ,  Gerald Cox

    发明人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi ,  Gerald Cox

    IPC分类号： C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H05H1/00

    CPC分类号： H01J37/32192

    摘要： A method of removing material from a substrate, and a plasma discharge device wherein a plasma is excited by microwave energy having an electric field which is azimuthally and axially uniform in relation to the plasma tube. The microwave cavity is divided longitudinally into sections by conducting partitions, each of which is separately fed with microwave energy, and the plasma tube extends through openings in the partitions.

    摘要翻译： 从衬底去除材料的方法和等离子体放电装置，其中等离子体由具有相对于等离子体管的方位角和轴向均匀的电场的微波能量激发。 微波腔通过导电隔板纵向分成几个部分，每个隔板分别供给微波能量，等离子体管延伸穿过隔板中的开口。

    Electrodeless lamp starting/operation with sources at different frequencies
    2.
    发明授权
    Electrodeless lamp starting/operation with sources at different frequencies 失效
    无电极灯起动/不同频率的电源操作

    公开(公告)号：US5767626A

    公开(公告)日：1998-06-16

    申请号：US568290

    申请日：1995-12-06

    申请人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi

    发明人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi

    IPC分类号： H01J65/04 ,  H05B41/24 ,  H05B41/38

    CPC分类号： H05B41/24 ,  H05B41/382

    摘要： An electrodeless lamp is started by coupling microwave power of a first frequency to a lamp cavity, while the discharge is maintained by coupling microwave power of a second frequency, wherein the first frequency is lower than the second frequency. A cooling fluid is impinged on the lamp bulb immediately before the application of the microwave power of the first frequency.

    摘要翻译： 通过将第一频率的微波功率耦合到灯泡腔来启动无电极灯，同时通过耦合第二频率的微波功率来维持放电，其中第一频率低于第二频率。 在施加第一频率的微波功率之前，冷却流体就立即撞在灯泡上。

    Methods for implementing highly efficient plasma traps
    3.
    发明授权
    Methods for implementing highly efficient plasma traps 有权
    实现高效等离子体阱的方法

    公开(公告)号：US08048329B2

    公开(公告)日：2011-11-01

    申请号：US12504525

    申请日：2009-07-16

    申请人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

    发明人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

    IPC分类号： H01J27/00

    CPC分类号： H05H1/46 ,  H01J37/32211 ,  H01J37/32357

    摘要： A method for minimizing microwave leakage into processing chamber of a microwave plasma system is provided. The method includes securing plasma traps to a plasma tube assembly, which is a cylindrical structure positioned upstream from the processing chamber and has a plasma-sustaining region. The plasma traps are electrically conductive disks surrounding the cylindrical structure and are positioned upstream from the processing chamber. The plasma traps include at least two electrically conductive disks. Each electrically conductive disk includes corrugated outer surfaces with plurality of corrugated peaks. The corrugated outer surface of the first electrically conductive disk is facing a corrugated outer surface of the second electrically conductive disk in a space-apart relationship to form an interstitial region between the electrically conductive disks. Both electrically conductive disk and the interstitial region form one of a set of upstream plasma traps and a set of downstream plasma traps relative to the plasma-sustaining region.

    摘要翻译： 提供了一种使微波泄漏到微波等离子体系统的处理室中的方法。 该方法包括将等离子体捕集阱固定到等离子体管组件，等离子体管组件是位于处理室上游的具有等离子体维持区域的圆柱形结构。 等离子体捕集器是围绕圆柱形结构并且位于处理室的上游的导电盘。 等离子体捕集器包括至少两个导电盘。 每个导电盘包括具有多个波纹峰的波纹状外表面。 第一导电盘的波纹状外表面以空间分开的关系面对第二导电盘的波纹状外表面，以形成导电盘之间的间隙区。 导电盘和间隙区形成一组上游等离子体捕集器和相对于等离子体维持区域的一组下游等离子体阱。

    Method for cleaning microwave applicator tube
    4.
    发明授权
    Method for cleaning microwave applicator tube 有权
    微波加热管清洗方法

    公开(公告)号：US07638004B1

    公开(公告)日：2009-12-29

    申请号：US11445487

    申请日：2006-05-31

    申请人： Hong Shih ,  Harmeet Singh ,  Raphael Casaes ,  Duane Outka ,  Mohammad Kamarehi

    发明人： Hong Shih ,  Harmeet Singh ,  Raphael Casaes ,  Duane Outka ,  Mohammad Kamarehi

    IPC分类号： B08B3/04

    CPC分类号： B08B3/08 ,  C11D3/3947 ,  C11D7/06 ,  C11D11/0041 ,  C11D11/0064 ,  G03F7/423 ,  G03F7/425 ,  G03F7/426

    摘要： A method of cleaning a microwave plasma applicator tube as described herein includes preparing a microwave plasma applicator for cleaning. A general cleaning of the plasma applicator tube is performed using an organic solvent wash and an ultrapure water wash. Selective cleanings of the tube are performed to remove selected contaminants. Such cleanings include a third wash with an alkaline cleaning solution, a fourth wash with an acidic cleaning solution and another wash using an ammonia and peroxide solution. The tube is rinsed using a sonicating wash performed in ultrapure water followed by drying. Also, the coil can be cleaned using acidic wash solution.

    摘要翻译： 如本文所述的清洁微波等离子体施加管的方法包括制备用于清洁的微波等离子体施加器。 使用有机溶剂洗涤和超纯水洗涤进行等离子体施加管的一般清洁。 执行管的选择性清洁以去除所选择的污染物。 这种清洁包括用碱性清洁溶液进行第三次洗涤，用酸性清洗溶液进行第四次洗涤，再用氨和过氧化物溶液进行洗涤。 使用在超纯水中进行的超声清洗冲洗管，然后干燥。 此外，线圈可以使用酸性洗涤溶液进行清洁。

    METHODS FOR IMPLEMENTING HIGHLY EFFICIENT PLASMA TRAPS
    8.
    发明申请
    METHODS FOR IMPLEMENTING HIGHLY EFFICIENT PLASMA TRAPS 有权
    执行高效等离子体传感器的方法

    公开(公告)号：US20090278054A1

    公开(公告)日：2009-11-12

    申请号：US12504525

    申请日：2009-07-16

    申请人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

    发明人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

    IPC分类号： H01J27/00

    CPC分类号： H05H1/46 ,  H01J37/32211 ,  H01J37/32357

    摘要： A method for minimizing microwave leakage into processing chamber of a microwave plasma system is provided. The method includes securing plasma traps to a plasma tube assembly, which is a cylindrical structure positioned upstream from the processing chamber and has a plasma-sustaining region. The plasma traps are electrically conductive disks surrounding the cylindrical structure and are positioned upstream from the processing chamber. The plasma traps include at least two electrically conductive disks. Each electrically conductive disk includes corrugated outer surfaces with plurality of corrugated peaks. The corrugated outer surface of the first electrically conductive disk is facing a corrugated outer surface of the second electrically conductive disk in a space-apart relationship to form an interstitial region between the electrically conductive disks. Both electrically conductive disk and the interstitial region form one of a set of upstream plasma traps and a set of downstream plasma traps relative to the plasma-sustaining region.

    摘要翻译： 提供了一种使微波泄漏到微波等离子体系统的处理室中的方法。 该方法包括将等离子体捕集阱固定到等离子体管组件，等离子体管组件是位于处理室上游的具有等离子体维持区域的圆柱形结构。 等离子体捕集器是围绕圆柱形结构并且位于处理室的上游的导电盘。 等离子体捕集器包括至少两个导电盘。 每个导电盘包括具有多个波纹峰的波纹状外表面。 第一导电盘的波纹状外表面以空间分开的关系面对第二导电盘的波纹状外表面，以形成导电盘之间的间隙区。 导电盘和间隙区形成一组上游等离子体捕集器和相对于等离子体维持区域的一组下游等离子体阱。

    Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
    9.
    发明授权
    Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system 有权
    用于创建高效下游微波等离子体系统的波纹等离子体捕集装置

    公开(公告)号：US07554053B2

    公开(公告)日：2009-06-30

    申请号：US11317874

    申请日：2005-12-23

    申请人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

    发明人： Mohammad Kamarehi ,  Ing-Yann Albert Wang

    IPC分类号： C23C16/00 ,  H05H1/00 ,  H05B6/76

    CPC分类号： H05H1/46 ,  H01J37/32229 ,  H01J37/32266 ,  H01J37/32357

    摘要： A plasma system is disclosed. The plasma system includes a microwave waveguide assembly having a longitudinal axis parallel with a first axis. The plasma system also includes a plasma tube assembly intersecting the microwave waveguide assembly. The plasma tube assembly has a longitudinal axis parallel with a second axis that is substantially orthogonal with the first axis. The plasma tube assembly also has a plasma-sustaining region defined by an upstream plurality of plasma traps and a downstream plurality of plasma traps.

    摘要翻译： 公开了一种等离子体系统。 等离子体系统包括具有与第一轴平行的纵轴的微波波导组件。 等离子体系统还包括与微波波导组件相交的等离子体管组件。 等离子体管组件具有与第二轴线平行的纵向轴线，该第二轴线基本上与第一轴线正交。 等离子体管组件还具有由上游多个等离子体捕集器和下游多个等离子体捕集器限定的等离子体维持区域。

    Remote plasma generator with sliding short tuner
    10.
    发明授权
    Remote plasma generator with sliding short tuner 失效
    远程等离子发生器带滑动调谐器

    公开(公告)号：US06439155B1

    公开(公告)日：2002-08-27

    申请号：US09747452

    申请日：2000-12-22

    申请人： Mohammad Kamarehi ,  Gerald M. Cox

    发明人： Mohammad Kamarehi ,  Gerald M. Cox

    IPC分类号： C23C1600

    CPC分类号： H01J37/32357 ,  H01J37/32192 ,  H01J37/32256 ,  H05H1/46 ,  H05H2001/4622

    摘要： A remote plasma generator, coupling microwave frequency energy to a gas and delivering radicals to a downstream process chamber, includes several features which, in conjunction, enable highly efficient radical generation. In the illustrated embodiments, more efficient delivery of oxygen and fluorine radicals translates to more rapid photoresist etch or ash rates. A single-crystal, one-piece sapphire applicator and transport tube minimizes recombination of radicals in route to the process chamber and includes a bend to avoid direct line of sight from the glow discharge to the downstream process chamber. Microwave transparent cooling fluid within a cooling jacket around the applicator enables high power, high temperature plasma production. Additionally, dynamic impedance matching via a sliding short at the terminus of the microwave cavity reduces power loss through reflected energy. At the same time, a low profile microwave trap produces a more dense plasma to increase radical production. In one embodiment, fluorine and oxygen radicals are separately generated and mixed just upstream of the process chamber, enabling individually optimized radical generation of the two species.

    摘要翻译： 远程等离子体发生器，将微波频率能量耦合到气体并将自由基递送到下游处理室，其包括若干特征，其结合使得能够实现高效率的自由基产生。 在所示实施例中，氧和氟自由基的更有效的递送转化为更快速的光致抗蚀剂蚀刻或灰分速率。 单晶，单件蓝宝石涂布器和输送管使路线中的自由基的复合最小化到处理室，并且包括弯曲以避免从辉光放电到下游处理室的直接视线。 涂布器周围的冷却套管内的微波透明冷却液可实现高功率，高温等离子体生产。 另外，通过在微波空腔末端的滑动短路的动态阻抗匹配通过反射能减少功率损耗。 同时，低调的微波阱产生更密集的等离子体以增加激进产生。 在一个实施方案中，分别产生氟和氧自由基，并刚刚混合在处理室的上游，从而能够单独优化两种物质的自由基产生。