公开(公告)号：US5961851A

公开(公告)日：1999-10-05

申请号：US626451

申请日：1996-04-02

申请人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi ,  Gerald Cox

发明人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi ,  Gerald Cox

IPC分类号： C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H05H1/00

CPC分类号： H01J37/32192

摘要： A method of removing material from a substrate, and a plasma discharge device wherein a plasma is excited by microwave energy having an electric field which is azimuthally and axially uniform in relation to the plasma tube. The microwave cavity is divided longitudinally into sections by conducting partitions, each of which is separately fed with microwave energy, and the plasma tube extends through openings in the partitions.

摘要翻译： 从衬底去除材料的方法和等离子体放电装置，其中等离子体由具有相对于等离子体管的方位角和轴向均匀的电场的微波能量激发。 微波腔通过导电隔板纵向分成几个部分，每个隔板分别供给微波能量，等离子体管延伸穿过隔板中的开口。

公开(公告)号：US5767626A

公开(公告)日：1998-06-16

申请号：US568290

申请日：1995-12-06

申请人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi

发明人： Mohammad Kamarehi ,  Richard Pingree ,  Jianou Shi

IPC分类号： H01J65/04 ,  H05B41/24 ,  H05B41/38

CPC分类号： H05B41/24 ,  H05B41/382

摘要： An electrodeless lamp is started by coupling microwave power of a first frequency to a lamp cavity, while the discharge is maintained by coupling microwave power of a second frequency, wherein the first frequency is lower than the second frequency. A cooling fluid is impinged on the lamp bulb immediately before the application of the microwave power of the first frequency.

摘要翻译： 通过将第一频率的微波功率耦合到灯泡腔来启动无电极灯，同时通过耦合第二频率的微波功率来维持放电，其中第一频率低于第二频率。 在施加第一频率的微波功率之前，冷却流体就立即撞在灯泡上。

公开(公告)号：US20050186680A1

公开(公告)日：2005-08-25

申请号：US10708251

申请日：2004-02-19

申请人： Richard Pingree ,  Palanikumara Sakthivel ,  Muhesh Vanodia ,  Michael Colson

发明人： Richard Pingree ,  Palanikumara Sakthivel ,  Muhesh Vanodia ,  Michael Colson

IPC分类号： G01N22/00 ,  B01J19/08 ,  G01N27/00 ,  G01N27/02 ,  H01L21/3065

CPC分类号： G01N27/023

摘要： A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.

摘要翻译： 在介质中固体材料检测的方法包括在相对于去除了光致抗蚀剂材料的工件的下游接收废气。 电磁电路被构造成包括废气，排出气体被电磁能激发，并且确定电磁电路的阻抗值，其中阻抗值对应于排气内固体物质的量。

公开(公告)号：US20060054281A1

公开(公告)日：2006-03-16

申请号：US10937946

申请日：2004-09-10

申请人： Richard Pingree ,  Michael Colson ,  Michael Silbert

发明人： Richard Pingree ,  Michael Colson ,  Michael Silbert

IPC分类号： C23F1/00

CPC分类号： H01J37/32357 ,  C09K5/10 ,  H01J37/32192 ,  H05H1/46

摘要： A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.

摘要翻译： 用于冷却等离子体管的方法和装置通常包括将烃介电传热流体流入由等离子体管和围绕等离子体管的同心管限定的空间。 在一个实施例中，烃流体被选择为具有小于0.002的耗散因数和大于或等于1.30kJ / kg * K的热效率系数。