- 专利标题： Method and device for manufacturing a thin film and magnetic recording medium
-
申请号： US4088申请日： 1998-01-07
-
公开(公告)号： US5962066A公开(公告)日： 1999-10-05
- 发明人: Kazuyoshi Honda , Yoshiharu Maezawa , Masaru Odagiri , Sadayuki Okazaki
- 申请人： Kazuyoshi Honda , Yoshiharu Maezawa , Masaru Odagiri , Sadayuki Okazaki
- 申请人地址： JPX Osaka
- 专利权人： Matsushita Electric Industrial Co. Ltd.
- 当前专利权人： Matsushita Electric Industrial Co. Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX6-194005 19940818; JPX7-093340 19950419
- 主分类号： C23C14/00
- IPC分类号： C23C14/00 ; C23C14/56 ; G11B5/64 ; G11B5/85 ; C23C4/00
摘要：
A method and a device for manufacturing a thin film by a vacuum deposition method, and a magnetic recording medium produced thereby are disclosed. A thin film of high quality is mass-produced while introducing reaction gas to a thin film forming section from a nozzle consisting of minute tubes, so that the flow of evaporated atoms is not disturbed by the reaction gas.
公开/授权文献
- USD351022S Double blade valvulotome 公开/授权日：1994-09-27
信息查询
IPC分类:
