发明授权
- 专利标题： Method of coating substrate with coating nozzle
- 专利标题（中）： 用涂层喷嘴涂覆基材的方法
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申请号： US005495申请日： 1998-01-12
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公开(公告)号： US5972426A公开(公告)日： 1999-10-26
- 发明人: Junji Kutsuzawa , Hiroyoshi Sago , Futoshi Shimai , Hidenori Miyamoto
- 申请人： Junji Kutsuzawa , Hiroyoshi Sago , Futoshi Shimai , Hidenori Miyamoto
- 申请人地址： JPX Kanagawa
- 专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址： JPX Kanagawa
- 优先权： JPX7-94196 19950329
- 主分类号： G03F7/16
- IPC分类号： G03F7/16 ; B05B1/14 ; B05B13/04 ; B05C5/02 ; B05C11/08 ; G02B5/20 ; H01L21/027 ; B05D3/12
摘要：
A coating nozzle includes an elongate nozzle body having a coating solution reservoir defined longitudinally therein for being supplied with a coating solution from an external coating solution supply. The elongate nozzle body also has a coating solution holder defined therein and opening away from the coating solution reservoir, for holding a coating solution against falling off as droplets under surface tension of the coating solution. A plurality of passages are defined in the elongate nozzle body and held in communication with the coating solution reservoir and the coating solution holder, for supplying the coating solution from the coating solution reservoir to the coating solution holder.
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