公开(公告)号：US5769946A

公开(公告)日：1998-06-23

申请号：US627694

申请日：1996-03-29

申请人： Junji Kutsuzawa ,  Hiroyoshi Sago ,  Futoshi Shimai ,  Hidenori Miyamoto

发明人： Junji Kutsuzawa ,  Hiroyoshi Sago ,  Futoshi Shimai ,  Hidenori Miyamoto

IPC分类号： G03F7/16 ,  B05B1/14 ,  B05B13/04 ,  B05C5/02 ,  B05C11/08 ,  G02B5/20 ,  H01L21/027 ,  B05C3/02 ,  B05B13/02 ,  B05C3/00 ,  B05C5/00

CPC分类号： B05C5/0254 ,  B05C11/08 ,  B05C5/0208 ,  B05B13/04 ,  B05C5/027

摘要： A coating nozzle includes an elongate nozzle body having a coating solution reservoir defined longitudinally therein for being supplied with a coating solution from an external coating solution supply. The elongate nozzle body also has a coating solution holder defined therein and opening away from the coating solution reservoir, for holding a coating solution against falling off as droplets under surface tension of the coating solution. A plurality of passages are defined in the elongate nozzle body and held in communication with the coating solution reservoir and the coating solution holder, for supplying the coating solution from the coating solution reservoir to the coating solution holder. The arrangement of the reservoir, the solution holder and the passages in the elongate nozzle body assures that a uniform layer of coating solution is deposited by the nozzle on a surface of a planar substrate.

摘要翻译： 涂布喷嘴包括细长的喷嘴体，其具有纵向地限定在其中的涂布溶液储存器，以从外部涂布溶液供应源供应涂布溶液。 细长喷嘴体还具有限定在其中的涂覆溶液保持器，并且远离涂覆溶液储存器，用于在涂布溶液的表面张力下保持涂布溶液不会作为液滴脱落。 多个通道被限定在细长喷嘴主体中，并且与涂布液储存器和涂布液保持器保持连通，用于将涂布溶液从涂布液储存器提供到涂布溶液保持器。 储存器，溶液保持器和细长喷嘴体中的通道的布置确保了通过喷嘴将均匀的涂层溶液层沉积在平面基板的表面上。

公开(公告)号：US5972426A

公开(公告)日：1999-10-26

申请号：US005495

申请日：1998-01-12

申请人： Junji Kutsuzawa ,  Hiroyoshi Sago ,  Futoshi Shimai ,  Hidenori Miyamoto

发明人： Junji Kutsuzawa ,  Hiroyoshi Sago ,  Futoshi Shimai ,  Hidenori Miyamoto

IPC分类号： G03F7/16 ,  B05B1/14 ,  B05B13/04 ,  B05C5/02 ,  B05C11/08 ,  G02B5/20 ,  H01L21/027 ,  B05D3/12

CPC分类号： B05C5/0254 ,  B05C11/08 ,  B05C5/0208 ,  B05B13/04 ,  B05C5/027

摘要： A coating nozzle includes an elongate nozzle body having a coating solution reservoir defined longitudinally therein for being supplied with a coating solution from an external coating solution supply. The elongate nozzle body also has a coating solution holder defined therein and opening away from the coating solution reservoir, for holding a coating solution against falling off as droplets under surface tension of the coating solution. A plurality of passages are defined in the elongate nozzle body and held in communication with the coating solution reservoir and the coating solution holder, for supplying the coating solution from the coating solution reservoir to the coating solution holder.

摘要翻译： 涂布喷嘴包括细长的喷嘴体，其具有纵向地限定在其中的涂布溶液储存器，以从外部涂布溶液供应源供应涂布溶液。 细长喷嘴体还具有限定在其中的涂覆溶液保持器，并且远离涂覆溶液储存器，用于在涂布溶液的表面张力下保持涂布溶液不会作为液滴脱落。 多个通道被限定在细长喷嘴体中，并且与涂布液储存器和涂布液保持器保持连通，用于将涂布溶液从涂布液储存器提供到涂布溶液保持器。

公开(公告)号：US06436472B1

公开(公告)日：2002-08-20

申请号：US08825256

申请日：1997-03-27

申请人： Hiroyoshi Sago ,  Shigemi Fujiyama ,  Futoshi Shimai ,  Akira Uehara

发明人： Hiroyoshi Sago ,  Shigemi Fujiyama ,  Futoshi Shimai ,  Akira Uehara

IPC分类号： B05D312

CPC分类号： H01L21/6715

摘要： A slit nozzle is positioned above an end of a glass substrate placed in an inner cup, and, while a coating solution is being ejected with reduced surface tension from the slit nozzle toward the glass substrate, the slit nozzle is translated parallel to the surface of the glass substrate to roughly coat the coating solution on substantially the entire surface of the glass substrate. Thereafter, the upper opening of the inner cup and the upper opening of an outer cup around the inner cup are closed by respective lids, and then the inner cup is rotated to rotate the glass substrate for thereby spreading the coated solution uniformly over the surface of the glass substrate under centrifugal forces.

摘要翻译： 狭缝喷嘴位于放置在内杯中的玻璃基板的端部的上方，并且当从狭缝喷嘴朝向玻璃基板喷射具有降低的表面张力的涂布溶液时，狭缝喷嘴平行于 所述玻璃基板在所述玻璃基板的基本上整个表面上大致涂覆所述涂布溶液。 此后，内杯的上部开口和内杯周围的外杯的上部开口由相应的盖封闭，然后内杯旋转以旋转玻璃基板，从而将涂覆的溶液均匀地铺展在 玻璃基板在离心力下。

公开(公告)号：US5439519A

公开(公告)日：1995-08-08

申请号：US176204

申请日：1994-01-03

申请人： Hiroyoshi Sago ,  Hirotsugu Kumazawa ,  Futoshi Shimai ,  Shigemi Fujiyama ,  Hiroki Endo ,  Hideya Kobari

发明人： Hiroyoshi Sago ,  Hirotsugu Kumazawa ,  Futoshi Shimai ,  Shigemi Fujiyama ,  Hiroki Endo ,  Hideya Kobari

IPC分类号： B05C11/08 ,  G03F7/16 ,  H01L21/00 ,  B05C11/02 ,  B05C5/00

CPC分类号： H01L21/6715 ,  B05C11/08 ,  G03F7/162

摘要： A solution applying apparatus has inner and outer cups each having an upper opening, the inner cup being rotatably disposed in the outer cup. The inner cup houses a planar workpiece such as a glass substrate therein which is to be coated with a coating solution such as a resist solution. The solution applying apparatus also has a lid assembly having an outer cup lid for closing the upper opening of the outer cup and an inner cup lid for closing the upper opening of the inner cup, the inner cup lid being rotatable with respect to the outer cup lid. The inner cup has drain holes defined in an outer circumferential portion thereof for providing communication between a space within the inner cup and a space outside of the inner cup to drain an excessive coating solution from the inner cup. The outer cup has an annular collection passage defined therein along the outer circumferential portion of the inner cup, the drain holes opening into the annular collection passage. The lid assembly includes a self-centering valve body that can be vertically movable into and out of snugly fitting relation to a through hole defined in the inner cup lid and a lost motion mechanism for moving the valve body to an open position thereof while the first and second cup lids remain closed and for opening the outer cup lid while the inner cup lid remains closed. After the workpiece has been coated with the coating solution, the valve body is lifted out of the through hole to smoothly eliminate a vacuum developed in the inner cup, and then the inner cup is opened.

摘要翻译： 溶液施加装置具有各自具有上开口的内杯和外杯，内杯可旋转地设置在外杯中。 内杯容纳有诸如抗蚀剂溶液等涂布溶液的平面状的工件，例如玻璃基板。 溶液施加装置还具有盖组件，其具有用于封闭外杯的上开口的外杯盖和用于封闭内杯的上开口的内杯盖，内杯盖可相对于外杯旋转 盖。 内杯具有限定在其外圆周部分中的排水孔，用于提供内杯内的空间和内杯外部的空间之间的连通，以从内杯排出过量的涂层溶液。 外杯具有沿着内杯的外圆周部分限定在其中的环形收集通道，排出孔通向环形收集通道。 盖组件包括自定心阀体，其可以垂直移动进入和离开与内杯盖中限定的通孔的紧密配合关系，以及用于将阀体移动到其打开位置的空动机构，而第一 并且第二杯盖保持关闭并且在内杯盖保持关闭时打开外杯盖。 在工件被涂布溶液之后，将阀体从通孔中提出，以平滑地消除在内杯中显影的真空，然后打开内杯。

公开(公告)号：US06761930B2

公开(公告)日：2004-07-13

申请号：US10199602

申请日：2002-07-19

申请人： Hiroyoshi Sago ,  Shigemi Fujiyama ,  Futoshi Shimai ,  Akira Uehara

发明人： Hiroyoshi Sago ,  Shigemi Fujiyama ,  Futoshi Shimai ,  Akira Uehara

IPC分类号： B05D142

CPC分类号： H01L21/6715

摘要： A slit nozzle is positioned above a surface of a substrate placed in a rotary coater, and, while the slit nozzle is translated parallel to the surface of the substrate a coating solution is ejected from the slit nozzle toward the glass substrate under conditions such that the effects of surface tension of the solution are minimized or substantially cancelled out, to uniformly coat the coating solution on substantially the entire surface of the substrate with minimum wasting of the solution.

摘要翻译： 狭缝喷嘴位于旋转涂布机的基板的表面上方，并且在狭缝喷嘴平行于基板的表面平行地平移时，将涂布液从狭缝喷嘴朝向玻璃基板喷射， 使溶液的表面张力的作用最小化或基本抵消，以最小程度地消除溶液的浪费，均匀地将涂布液涂覆在基材的基本整个表面上。

公开(公告)号：US5785759A

公开(公告)日：1998-07-28

申请号：US742581

申请日：1996-10-28

申请人： Hiroyoshi Sago ,  Shigemi Fujiyama ,  Futoshi Shimai ,  Koichi Nagasawa

发明人： Hiroyoshi Sago ,  Shigemi Fujiyama ,  Futoshi Shimai ,  Koichi Nagasawa

IPC分类号： B05C11/02 ,  B05C11/08 ,  G03F7/16 ,  H01L21/027 ,  H01L21/31 ,  H01L21/316 ,  B05B13/02 ,  B05C13/00

CPC分类号： B05C11/02 ,  G03F7/162

摘要： A rotating cup type liquid supply device comprises an inner cup 3, a vacuum chuck 5 disposed in the center of a bottom surface of the inner cup 3 for holding thereon a planar material W to be treated, and a tray 7 fixed onto the bottom surface of the inner cup 3 for substantially surrounding the planar material W held by the vacuum chuck 5. The tray is of a substantially rectangular shape in plan view and includes an tapered wall portion 9 turned inwardly along a circumferential wall portion thereof for defining an upper opening 8 of the tray 7. The tray 7 further includes a plurality of drain guiding conduits 10 each extending at a predetermined angle outwardly from an outer peripheral portion thereof. Also, the tray can be provided thereon with the cover having an opening slightly larger than the planar material W.

摘要翻译： 旋转杯型液体供给装置包括内杯3，设置在内杯3的底面的中心的真空吸盘5，用于保持待处理的平面材料W，以及固定在底面上的托盘7 用于基本上围绕由真空吸盘5保持的平面材料W。托盘在平面图中具有基本上矩形的形状，并且包括沿着其周壁部分向内转动的锥形壁部分9，用于限定上开口 托盘7还包括多个排水引导管道10，每个排水引导管道10以预定的角度从其外围部分向外延伸。 此外，托盘可以设置在其上，盖具有比平面材料W稍大的开口。

公开(公告)号：US6090216A

公开(公告)日：2000-07-18

申请号：US67452

申请日：1998-04-28

申请人： Kazunobu Yamaguchi ,  Junji Kutsuzawa ,  Shigemi Fujiyama ,  Hiroyoshi Sago

发明人： Kazunobu Yamaguchi ,  Junji Kutsuzawa ,  Shigemi Fujiyama ,  Hiroyoshi Sago

IPC分类号： H01L21/027 ,  B05B15/02 ,  B05C5/02 ,  H01L21/304 ,  B08B9/00

CPC分类号： B05B15/025 ,  B05C5/0245

摘要： A cleaning device for cleaning a slit-like nozzle having an opening of a predetermined breadth for discharging liquid paint, with uniformity and with a small amount of cleaning liquid, wherein under a condition that a nozzle N is mounted on receiver plates 4, 4, a substantially air-tight space is formed, and a gas supply conduit is opened at one end of a cleaning portion 2 in the direction of the breadth of the nozzle, and an exhaust conduit 7 is opened at the other end thereof, being disposed in a vicinity of the gas supply conduit, so as to supply the cleaning liquid into the air-tight space. Then, since the air inside of the air-tight space is extracted from the exhaust conduit 7, the gas supplied from the one end flows towards the exhaust conduit 7 at the other end. The cleaning liquid contacts with the surface of the nozzle so as to dissolve and wash away any liquid paint adhering thereon.

摘要翻译： 一种用于清洁具有用于排出液体涂料的预定宽度的开口的狭缝状喷嘴的均匀性和少量清洁液体的清洁装置，其中在喷嘴N安装在接收板4,4上的条件下， 形成基本上气密的空间，并且在清洁部分2的一端沿喷嘴的宽度方向打开气体供应管道，并且在其另一端打开排气导管7， 在气体供应管道附近，以便将清洁液体供应到气密空间中。 然后，由于气密空间内的空气从排气导管7抽出，所以从一端供给的气体在另一端流向排气导管7。 清洗液体与喷嘴的表面接触，以便溶解和洗涤附着在其上的任何液体涂料。

公开(公告)号：US5332557A

公开(公告)日：1994-07-26

申请号：US5602

申请日：1993-01-19

申请人： Tsutomu Sahoda ,  Hideyuki Mizuki ,  Hidenori Miyamoto ,  Hisashi Hori ,  Hiroyoshi Sago

发明人： Tsutomu Sahoda ,  Hideyuki Mizuki ,  Hidenori Miyamoto ,  Hisashi Hori ,  Hiroyoshi Sago

IPC分类号： B01J19/00 ,  C03C17/25 ,  C23C18/12 ,  G05D23/22 ,  H01L21/00 ,  H01L21/324 ,  H01L21/677 ,  F28D21/00 ,  G05D23/19 ,  H05H1/24

CPC分类号： H01L21/67757 ,  G05D23/1934 ,  G05D23/22 ,  H01L21/67115 ,  Y10S422/906

摘要： A plurality of workpieces are supported on a workpiece holder disposed over an opening defined in a horizontal base plate and connected to an evacuating device. A reaction chamber, which is supported on an arm of a lifting and lowering device, is vertically movable with respect to the base plate between a lowered position in which the reaction chamber defines a closed space which accommodates the workpieces therein and a lifted position in which the workpieces are exposed out of the reaction chamber. A heating device, which is supported on an arm of another lifting and lowering device, is vertically movable with respect to the base plate between a lowered position in which the heating device surrounds the reaction chamber and a lifted position in which the reaction chamber is exposed out of the heating device.

摘要翻译： 多个工件被支撑在设置在水平基板中限定的开口上并连接到抽空装置的工件保持件上。 支撑在提升和降低装置的臂上的反应室可在下降位置之间相对于基板垂直移动，其中反应室限定容纳工件的封闭空间和提升位置， 工件暴露在反应室外。 支撑在另一升降装置的臂上的加热装置可相对于基板垂直移动，该下降位置在加热装置围绕反应室的下降位置和反应室暴露于其中的提升位置之间 离开加热装置。

公开(公告)号：US5591262A

公开(公告)日：1997-01-07

申请号：US410315

申请日：1995-03-24

申请人： Hiroyoshi Sago ,  Hideya Kobari ,  Koji Ueda ,  Hidenori Miyamoto ,  Ryuzo Takatsuki

发明人： Hiroyoshi Sago ,  Hideya Kobari ,  Koji Ueda ,  Hidenori Miyamoto ,  Ryuzo Takatsuki

IPC分类号： G03F7/16 ,  B05C11/08 ,  H01L21/00 ,  H01L21/027 ,  H01L21/304 ,  H01L21/306 ,  H01L21/683 ,  B05C7/00

CPC分类号： H01L21/67051 ,  Y10S134/902

摘要： The invention disclosed defined a vertically extending passage through the rotary center of an inner cup or the rotary center of a spinner in a notary chemical treater, disposes a stationary cleaning fluid nozzle in the passage, and injects the cleaning fluid from the nozzle to clean a lid of the rotary chemical treater and the underside of an object treatment within the treater. The underside of the lid and the underside of the objective part are efficiently cleaned, and the need for sealing the movable parts against the cleaning fluid is eliminated because the nozzle is stationary, ensuring the prevention of the cleaning fluid from leaking.

摘要翻译： 本发明公开了一种通过内杯的旋转中心或旋转器在公证化学处理器中的旋转中心的垂直延伸的通道，将固定的清洁流体喷嘴置于通道中，并将喷嘴从喷嘴喷射到清洁 旋转化学处理器的盖子和处理器内的物体处理的下侧。 盖子的下侧和目标部分的下侧被有效地清洁，并且由于喷嘴是静止的，消除了将可动部件密封在清洁流体上的需要，从而确保防止清洗液体泄漏。

公开(公告)号：US5415691A

公开(公告)日：1995-05-16

申请号：US994364

申请日：1992-12-21

申请人： Shigemi Fujiyama ,  Kazunobu Yamaguchi ,  Hiroyoshi Sago

发明人： Shigemi Fujiyama ,  Kazunobu Yamaguchi ,  Hiroyoshi Sago

IPC分类号： B05C11/08 ,  G03F7/16 ,  H01L21/027 ,  H01L21/30 ,  B05C5/00 ,  B05C11/02 ,  B05C13/02

CPC分类号： G03F7/162 ,  Y10T279/11

摘要： A glass substrate is supported on a pedestal in a rotatable cup having an upper opening. The pedestal, which is substantially similar in shape to the glass substrate, has a ridge extending along an outer peripheral edge of an upper surface thereof, for engaging an outer peripheral edge of a lower surface of the glass substrate. After a resist solution to be coated on the glass substrate is applied to an upper surface thereof, the upper opening of the rotatable cup is closed by a cover, and then the rotatable cup is rotated to spread the applied resist solution uniformly over the upper surface under centrifugal forces. In one embodiment, the apparatus comprises an inner rotatable cup and an outer rotatable cup, each with its own separate cover. In another embodiment, a pedestal is mounted on the bottom of the inner cup having a vacuum chuck movable therein. In a third embodiment, a flow-rectifying plate is mounted on the lower surface of the cover whereby fluid from nozzles is ejected onto the upper surface of the flow rectifying plate and then into the cup.

摘要翻译： 玻璃基板支撑在具有上开口的可旋转杯中的基座上。 与玻璃基板基本相似的基座具有沿其上表面的外周缘延伸的脊，用于接合玻璃基板的下表面的外周边缘。 将待涂覆在玻璃基板上的抗蚀剂溶液施加到其上表面之后，可旋转杯的上部开口由盖封闭，然后可旋转杯旋转以将涂覆的抗蚀剂溶液均匀地铺展在上表面上 在离心力下。 在一个实施例中，该装置包括内部可旋转杯和外部可旋转杯，每个具有其独立的罩。 在另一个实施例中，底座安装在内杯的底部上，其具有可在其中移动的真空吸盘。 在第三实施例中，整流板安装在盖的下表面上，由此将来自喷嘴的流体喷射到整流板的上表面上，然后进入杯中。