发明授权
US5976761A Fractionation of phenol formaldehyde condensate and photoresist
compositions produced therefrom
失效
分离苯酚甲醛缩合物和由其制备的光致抗蚀剂组合物
- 专利标题： Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom
- 专利标题（中）： 分离苯酚甲醛缩合物和由其制备的光致抗蚀剂组合物
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申请号： US47571申请日： 1998-03-25
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公开(公告)号： US5976761A公开(公告)日： 1999-11-02
- 发明人: M. Dalil Rahman , Daniel P. Aubin , Dinesh N. Khanna , Sunit S. Dixit
- 申请人： M. Dalil Rahman , Daniel P. Aubin , Dinesh N. Khanna , Sunit S. Dixit
- 申请人地址： VGX
- 专利权人： Clariant Finance (BVI) Limited
- 当前专利权人： Clariant Finance (BVI) Limited
- 当前专利权人地址： VGX
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; C08G8/00 ; C08G8/08 ; C08L61/06 ; G03F7/023 ; C08J3/00
摘要：
A process for producing a water insoluble, aqueous alkali soluble, film forming novolak resin having low metal ions, made by the fractionation of a phenol formaldehyde condensation product, a process for producing a resin a photoresist composition of superior quality containing such novolak resin, and a method for producing a semiconductor device using such photoresist composition.
公开/授权文献
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